Inductively coupled plasma etching and processing techniques for type-II InAs/GaSb superlattices infrared detectors toward high fill factor focal plane arrays
2012 ◽
Vol 24
(18)
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pp. 1581-1583
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2012 ◽
Vol 11
(4)
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pp. 043003-1
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2005 ◽
Vol 34
(6)
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pp. 740-745
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2015 ◽
Vol 32
(5)
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pp. 058102
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