Fabrication of pyramidal corrugated quantum well infrared photodetector focal plane arrays by inductively coupled plasma etching with BCl3/Ar

2012 ◽  
Vol 11 (4) ◽  
pp. 043003-1 ◽  
Author(s):  
Jason Sun ◽  
Kwong-Kit Choi ◽  
Unchul Lee
Keyword(s):  
Quantum Well ◽  
Plasma Etching ◽  
Focal Plane ◽  
Inductively Coupled Plasma ◽  
Focal Plane Arrays ◽  
Infrared Photodetector ◽  
Quantum Well Infrared Photodetector ◽  
Inductively Coupled Plasma Etching ◽  
Inductively Coupled

Large-format broadband multicolor GaAs/AlGaAs quantum well infrared photodetector (QWIP) focal plane arrays

2001 ◽  
Author(s):  
Sumith V. Bandara ◽  
Sarath D. Gunapala ◽  
John K. Liu ◽  
S. B. Rafol ◽  
David Z. Ting ◽  
...  
Keyword(s):  
Quantum Well ◽  
Focal Plane ◽  
Focal Plane Arrays ◽  
Infrared Photodetector ◽  
Large Format ◽  
Quantum Well Infrared Photodetector

Two-color quantum well infrared photodetector focal plane arrays

2006 ◽  
Author(s):  
Jason Bundas ◽  
Kelly Patnaude ◽  
Richard Dennis ◽  
Douglas Burrows ◽  
Robert Cook ◽  
...  
Keyword(s):  
Quantum Well ◽  
Focal Plane ◽  
Focal Plane Arrays ◽  
Infrared Photodetector ◽  
Quantum Well Infrared Photodetector

640×512 pixel narrow-band, four-band, and broad-band quantum well infrared photodetector focal plane arrays

2003 ◽  
Vol 44 (5-6) ◽  
pp. 411-425 ◽  
Author(s):  
S.D. Gunapala ◽  
S.V. Bandara ◽  
J.K. Liu ◽  
S.B. Rafol ◽  
J.M. Mumolo ◽  
...  
Keyword(s):  
Quantum Well ◽  
Focal Plane ◽  
Narrow Band ◽  
Broad Band ◽  
Focal Plane Arrays ◽  
Infrared Photodetector ◽  
Quantum Well Infrared Photodetector
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