Low-temperature CMOS-compatible 3D-integration of monocrystalline-silicon based PZT RF MEMS switch actuators on rf substrates

Author(s):  
Farizah Saharil ◽  
Robert V. Wright ◽  
Pekka Rantakari ◽  
Paul B. Kirby ◽  
Tauno Vaha-Heikkila ◽  
...  
2010 ◽  
Vol 116 (1) ◽  
pp. 35-40
Author(s):  
Radhapiyari Laishram ◽  
O. P. Thakur ◽  
D. K. Bhattacharya ◽  
Harsh ◽  
Anshu Goyal ◽  
...  

2004 ◽  
Author(s):  
Narendra V. Lakamraju ◽  
Bruce Kim ◽  
Stephen M. Phillips

2014 ◽  
Vol 62 (7) ◽  
pp. 1437-1447 ◽  
Author(s):  
Sara S. Attar ◽  
Sormeh Setoodeh ◽  
Raafat R. Mansour ◽  
Deepnarayan Gupta

2009 ◽  
Vol 19 (6) ◽  
pp. 380-382 ◽  
Author(s):  
C.D. Nordquist ◽  
M.S. Baker ◽  
G.M. Kraus ◽  
D.A. Czaplewski ◽  
G.A. Patrizi

2020 ◽  
Vol 12 ◽  
Author(s):  
Pampa Debnath ◽  
Ujjwal Mondal ◽  
Arpan Deyasi

Aim:: Computation of loss factors for one-bit RF MEMS switch over Ku, K and Ka-band for two different insulating substrates. Objective:: Numerical investigation of return loss, insertion loss, isolation loss are computed under both actuated and unactuated states for two different insulating substrates of the 1-bit RF MEMS switch, and corresponding up and down-capacitances are obtained. Methods:: The unique characteristics of a 1-bit RF MEMS switch of providing higher return loss under both actuated and unactuated states and also of isolation loss with negligible insertion loss makes it as a prime candidate for phase shifter application. This is presented in this manuscript with a keen focus on improvement capability by changing transmission line width, and also of overlap area; where dielectric constant of the substrate also plays a vital role. Results:: The present work exhibits very low down-capacitance over the spectrum whereas considerable amount of up-capacitance. Also when overall performance in terms of all loss parameters are considered, switch provides very low insertion loss, good return loss under actuated state and standard isolation loss. Conclusion:: Reduction of transmission line width of about 33% improved the performance of the switch by increasing isolation loss. Isolation loss of -40 dB is obtained at actuated condition in higher microwave spectra for SiO 2 at higher overlap area. Down capacitance of ~ 1dB is obtained which is novel as compared with other published literature. Moreover, a better combination of both return loss, isolation loss and insertion loss are reported in this present work compared with all other published data so far.


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