High power and low temperature coefficient of frequency oscillator based on a fully anchored and oxide compensated ALN contour-mode MEMS resonator
2014 ◽
Vol 215
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pp. 189-196
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2011 ◽
Vol 2
(3)
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pp. 139-150
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Keyword(s):
2017 ◽
Vol 118
(10)
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pp. 935-945
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Keyword(s):
Keyword(s):
2009 ◽
Vol 138
(1)
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pp. 283-288
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