A Novel Peninsula-island Structure for Sensing Ultra-low Pressure Based on Dry-wet Combination Etching Process
2011 ◽
Vol 4
(1)
◽
pp. 34-39
◽
2016 ◽
Vol 49
(7)
◽
pp. 075110
◽
Keyword(s):
2016 ◽
Vol 27
(12)
◽
pp. 124012
◽
Keyword(s):
2017 ◽
Vol 16
(3)
◽
pp. 034501
◽
Keyword(s):
1974 ◽
Vol 32
◽
pp. 544-545
1988 ◽
Vol 46
◽
pp. 434-435
Keyword(s):
1980 ◽
Vol 38
◽
pp. 570-571
Keyword(s):
2002 ◽
Vol 82
(1)
◽
pp. 137-165
◽