Characterization of negative ion beam extracted from a negative ion source with a particle-in-cell model

Author(s):  
Laurent Garrigues ◽  
Gwenael Fubiani ◽  
Jean-Pierre Boeuf
2020 ◽  
Vol 91 (11) ◽  
pp. 113302
Author(s):  
H. Kaminaga ◽  
T. Takimoto ◽  
A. Tonegawa ◽  
K. N. Sato

2019 ◽  
Vol 61 (6) ◽  
pp. 065003 ◽  
Author(s):  
A Pandey ◽  
Debrup Mukherjee ◽  
Dipshikha Borah ◽  
M Bandyopadhyay ◽  
Himanshu Tyagi ◽  
...  

2018 ◽  
Author(s):  
M. Fadone ◽  
V. Antoni ◽  
D. Aprile ◽  
G. Chitarin ◽  
A. Fassina ◽  
...  

1986 ◽  
Vol 75 ◽  
Author(s):  
Eiichi Izumi ◽  
Yoshinori Ikebe ◽  
Hiroyasu Shichi ◽  
Hifumi Tamura

A variety of materials such as semiconductors, metals, and insulators have been analyzed by use of the Hitachi IMA-3 ion microprobe analyzer. From the depth profile of a GaAs/AQ GaAs superlattice(50Å), a depth resolution of 45Å was obtained at 2350Å below the surface. The stable depth profile of a multilayer plastic film was obtained by using the negative ion beam(O) as a primary ion for charge neutralization. Further, the usefulness of the total ion monitoring method for correcting the changing factors of secondary ion intensity is demonstrated.


2016 ◽  
Vol 57 (1) ◽  
pp. 016025 ◽  
Author(s):  
P. Veltri ◽  
E. Sartori ◽  
P. Agostinetti ◽  
D. Aprile ◽  
M. Brombin ◽  
...  

2002 ◽  
Vol 73 (3) ◽  
pp. 1212-1216 ◽  
Author(s):  
Nam-Woong Paik ◽  
Steven Kim

2005 ◽  
Vol 74 (1-4) ◽  
pp. 311-317 ◽  
Author(s):  
M. Hanada ◽  
T. Seki ◽  
N. Takado ◽  
T. Inoue ◽  
T. Morishita ◽  
...  

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