MEMS pressure sensors design by the COMSOL system
2003 ◽
Vol 70
(5-2003)
◽
pp. 251-257
◽
2016 ◽
Vol 2016
(DPC)
◽
pp. 000464-000487
Keyword(s):
Keyword(s):
2005 ◽
Vol 72
(2-2005)
◽
pp. 111-121
◽