AlN epitaxial film on 6H-SiC(0001) using MOCVD for GHz-band SAW devices

This paper reports surface acoustic wave (SAW) devices fabricated on AlN epitaxial film grown on sapphire, aiming to avoid the detrimental polarization axis inconsistency and refrained crystalline quality of the normally used polycrystalline AlN films. Devices with center frequency of 357 MHz and 714 MHz have been fabricated. The stop band rejection ratio of the as-obtained device reaches 24.5 dB and the pass band ripple is profoundly smaller compared to most of the reported AlN SAW devices with the similar configuration. Judging from the rather high edge dislocation level of the film used in this study, the properties of the SAW devices have great potential to be improved by further improving the crystalline quality of the film. It is then concluded that the AlN epitaxial film is favorable for high quality SAW devices to meet the high frequency and low power consumption challenges facing the signal processing components.

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Low propagation loss of atomically-flat surface aln with low dislocation density for 5-ghz band saw devices

IEEE Ultrasonics Symposium, 2005. ◽

10.1109/ultsym.2005.1602891 ◽

2006 ◽

Cited By ~ 1

Author(s):

K. Uehara ◽

Y. Aota ◽

S. Kameda ◽

H. Nakase ◽

K. Tsubouchi

Keyword(s):

Dislocation Density ◽

Flat Surface ◽

Propagation Loss ◽

Saw Devices ◽

Low Dislocation Density ◽

Band Saw ◽

5 Ghz ◽

Atomically Flat

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Ultrawide-Band SAW Devices Using SH0 Mode Wave with Increased Velocity for 5G Front-Ends

10.1109/ius52206.2021.9593689 ◽

2021 ◽

Author(s):

Hongyan Zhou ◽

Shibin Zhang ◽

Jinbo Wu ◽

Pengcheng Zheng ◽

Liping Zhang ◽

...

Keyword(s):

Mode Wave ◽

Saw Devices ◽

Band Saw

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Fine Tuning of Narrow-Band SAW Devices Using Dielectric Overlays

10.1109/ultsym.1977.196916 ◽

1977 ◽

Cited By ~ 5

Author(s):

C.N. Helmick ◽

D.J. White ◽

R.L. King

Keyword(s):

Narrow Band ◽

Fine Tuning ◽

Saw Devices ◽

Band Saw

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Characterization of RF Sputtered ZnO Piezoelectric Films Using Transmission Electron Microscope

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100114050 ◽

1975 ◽

Vol 33 ◽

pp. 86-87

Author(s):

Kemining W. Yeh ◽

Richard S. Muller ◽

Wei-Kuo Wu ◽

Jack Washburn

Keyword(s):

Integrated Circuit ◽

Acoustic Waves ◽

New Technology ◽

Surface Acoustic Waves ◽

Electromechanical Properties ◽

Leading Role ◽

Saw Devices ◽

Transmission Electron ◽

High Degree

Considerable and continuing interest has been shown in the thin film transducer fabrication for surface acoustic waves (SAW) in the past few years. Due to the high degree of miniaturization, compatibility with silicon integrated circuit technology, simplicity and ease of design, this new technology has played an important role in the design of new devices for communications and signal processing. Among the commonly used piezoelectric thin films, ZnO generally yields superior electromechanical properties and is expected to play a leading role in the development of SAW devices.

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On the Performance Evaluation of Commercial SAW Resonators by Means of a Direct and Reliable Equivalent-Circuit Extraction

Micromachines ◽

10.3390/mi12030303 ◽

2021 ◽

Vol 12 (3) ◽

pp. 303

Author(s):

Giovanni Gugliandolo ◽

Zlatica Marinković ◽

Giuseppe Campobello ◽

Giovanni Crupi ◽

Nicola Donato

Keyword(s):

Performance Evaluation ◽

Acoustic Wave ◽

Equivalent Circuit ◽

Surface Acoustic Wave ◽

Equivalent Circuit Model ◽

Practical Applications ◽

Saw Devices ◽

S Parameter ◽

Commercial Device ◽

Saw Resonators

Nowadays, surface acoustic wave (SAW) resonators are attracting growing attention, owing to their widespread applications in various engineering fields, such as electronic, telecommunication, automotive, chemical, and biomedical engineering. A thorough assessment of SAW performance is a key task for bridging the gap between commercial SAW devices and practical applications. To contribute to the accomplishment of this crucial task, the present paper reports the findings of a new comparative study that is based on the performance evaluation of different commercial SAW resonators by using scattering (S-) parameter measurements coupled with a Lorentzian fitting and an accurate modelling technique for the straightforward extraction of a lumped-element equivalent-circuit representation. The developed investigation thus provides ease and reliability when choosing the appropriate commercial device, depending on the requirements and constraints of the given sensing application. This paper deals with the performance evaluation of commercial surface acoustic wave (SAW) resonators by means of scattering (S-) parameter measurements and an equivalent-circuit model extracted using a reliable modeling procedure. The studied devices are four TO-39 packaged two-port resonators with different nominal operating frequencies: 418.05, 423.22, 433.92, and 915 MHz. The S-parameter characterization was performed locally around the resonant frequencies of the tested SAW resonators by using an 8753ES Agilent vector network analyzer (VNA) and a home-made calibration kit. The reported measurement-based study has allowed for the development of a comprehensive and detailed comparative analysis of the performance of the investigated SAW devices. The characterization and modelling procedures are fully automated with a user-friendly graphical user interface (GUI) developed in the Python environment, thereby making the experimental analysis faster and more efficient.

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