AlN epitaxial film with atomically flat surface for GHz-band SAW devices

Author(s):  
K. Uehara ◽  
H. Nakamura ◽  
H. Nakase ◽  
K. Tsubouchi
2005 ◽  
Vol 44 (6B) ◽  
pp. 4512-4515 ◽  
Author(s):  
Kensei Uehara ◽  
Yuji Aota ◽  
Tomohiko Shibata ◽  
Suguru Kameda ◽  
Hiroyuki Nakase ◽  
...  

Author(s):  
K. Uehara ◽  
C.-M. Yang ◽  
T. Furusho ◽  
S.-K. Kim ◽  
S. Kameda ◽  
...  
Keyword(s):  

Author(s):  
K. Uehara ◽  
C.-M. Yang ◽  
T. Shibata ◽  
S.-K. Kim ◽  
S. Kameda ◽  
...  
Keyword(s):  
Band Saw ◽  
5 Ghz ◽  

Coatings ◽  
2021 ◽  
Vol 11 (8) ◽  
pp. 888
Author(s):  
Pengfei Zhang ◽  
Weidong Chen ◽  
Longhui Zhang ◽  
Shi He ◽  
Hongxing Wang ◽  
...  

In this paper, we successfully synthesized homoepitaxial diamond with high quality and atomically flat surface by microwave plasma chemical vapor deposition. The sample presents a growth rate of 3 μm/h, the lowest RMS of 0.573 nm, and the narrowest XRD FWHM of 31.32 arcsec. An effect analysis was also applied to discuss the influence of methane concentration on the diamond substrates.


2002 ◽  
Vol 41 (Part 2, No. 11A) ◽  
pp. L1218-L1220 ◽  
Author(s):  
Masashi Harada ◽  
Takayuki Nagano ◽  
Noriyoshi Shibata

2011 ◽  
Vol 485 ◽  
pp. 215-218 ◽  
Author(s):  
Hiroki Miyazaki ◽  
Yutaka Adachi ◽  
Isao Sakaguchi ◽  
Takamasa Ishigaki ◽  
Naoki Ohashi

The processes for polishing a ZnO surface were investigated with the aim of establishing a process for obtaining an atomically flat surface with high crystalline quality. The defects in a layer undergoing mechanical polishing were monitored through photoluminescence measurements, and the purity of the polished surface was characterized by SIMS. An atomicallyfishing process.


2014 ◽  
Vol 5 ◽  
pp. 501-506 ◽  
Author(s):  
Xiaoning Zhang ◽  
Masudur Rahman ◽  
David Neff ◽  
Michael Louis Norton

Maintaining the structural fidelity of DNA origami structures on substrates is a prerequisite for the successful fabrication of hybrid DNA origami/semiconductor-based biomedical sensor devices. Molybdenum disulfide (MoS2) is an ideal substrate for such future sensors due to its exceptional electrical, mechanical and structural properties. In this work, we performed the first investigations into the interaction of DNA origami with the MoS2 surface. In contrast to the structure-preserving interaction of DNA origami with mica, another atomically flat surface, it was observed that DNA origami structures rapidly lose their structural integrity upon interaction with MoS2. In a further series of studies, pyrene and 1-pyrenemethylamine, were evaluated as surface modifications which might mitigate this effect. While both species were found to form adsorption layers on MoS2 via physisorption, 1-pyrenemethylamine serves as a better protective agent and preserves the structures for significantly longer times. These findings will be beneficial for the fabrication of future DNA origami/MoS2 hybrid electronic structures.


2016 ◽  
Vol 09 (02) ◽  
pp. 1650034 ◽  
Author(s):  
Junning Gao ◽  
Zhibiao Hao ◽  
Lang Niu ◽  
Lai Wang ◽  
Changzheng Sun ◽  
...  

This paper reports surface acoustic wave (SAW) devices fabricated on AlN epitaxial film grown on sapphire, aiming to avoid the detrimental polarization axis inconsistency and refrained crystalline quality of the normally used polycrystalline AlN films. Devices with center frequency of 357 MHz and 714 MHz have been fabricated. The stop band rejection ratio of the as-obtained device reaches 24.5 dB and the pass band ripple is profoundly smaller compared to most of the reported AlN SAW devices with the similar configuration. Judging from the rather high edge dislocation level of the film used in this study, the properties of the SAW devices have great potential to be improved by further improving the crystalline quality of the film. It is then concluded that the AlN epitaxial film is favorable for high quality SAW devices to meet the high frequency and low power consumption challenges facing the signal processing components.


Sign in / Sign up

Export Citation Format

Share Document