scholarly journals Hydrogenation of Boron Carbon Nitride Thin Films for Low-k Dielectric Applications

2021 ◽  
Author(s):  
Shraddha Dhanraj Nehate ◽  
Sreeram Sundaresh ◽  
Robert Peale ◽  
Kalpathy B. Sundaram
Keyword(s):  
Thin Films ◽  
Carbon Nitride ◽  
Boron Carbon Nitride ◽  
Low K ◽  
Boron Carbon

(Invited) Boron Carbon Nitride (BCN) Thin Films for Low-k Interdielectric Layer Applications

2021 ◽  
Vol MA2021-02 (14) ◽  
pp. 659-659
Author(s):  
Shraddha Dhanraj Nehate ◽  
Kalpathy B. Sundaram
Keyword(s):  
Thin Films ◽  
Carbon Nitride ◽  
Boron Carbon Nitride ◽  
Low K ◽  
Boron Carbon

scholarly journals A brief overview of RF sputtering deposition of boron carbon nitride (BCN) thin films

2018 ◽  
Vol 2 (1) ◽  
pp. 79-93 ◽  
Author(s):  
Moustafa M. Zagho ◽  
Hana D. Dawoud ◽  
Nasr Bensalah ◽  
T. M. Altahtamouni
Keyword(s):  
Thin Films ◽  
Carbon Nitride ◽  
Rf Sputtering ◽  
Sputtering Deposition ◽  
Boron Carbon Nitride ◽  
Boron Carbon

Transition from amorphous boron carbide to hexagonal boron carbon nitride thin films induced by nitrogen ion assistance

2002 ◽  
Vol 92 (9) ◽  
pp. 5177-5182 ◽  
Author(s):  
R. Gago ◽  
I. Jiménez ◽  
F. Agulló-Rueda ◽  
J. M Albella ◽  
Zs. Czigány ◽  
...  
Keyword(s):  
Thin Films ◽  
Boron Carbide ◽  
Carbon Nitride ◽  
Amorphous Boron ◽  
Nitrogen Ion ◽  
Boron Carbon Nitride ◽  
Ion Assistance ◽  
Boron Carbon

Boron carbon nitride film containing hydrogen for 2nm node low-k interconnection

2009 ◽  
Author(s):  
Hidemitsu Aoki ◽  
Takuroh Masuzumi ◽  
Makoto Hara ◽  
Daisuke Watanabe ◽  
Chiharu Kimura ◽  
...  
Keyword(s):  
Carbon Nitride ◽  
Nitride Film ◽  
Carbon Nitride Film ◽  
Boron Carbon Nitride ◽  
Low K ◽  
Boron Carbon

scholarly journals Boron Carbon Nitride Thin Films: From Disordered to Ordered Conjugated Ternary Materials

2020 ◽  
Vol 142 (49) ◽  
pp. 20883-20891
Author(s):  
Paolo Giusto ◽  
Hiroki Arazoe ◽  
Daniel Cruz ◽  
Paola Lova ◽  
Tobias Heil ◽  
...  
Keyword(s):  
Thin Films ◽  
Carbon Nitride ◽  
Boron Carbon Nitride ◽  
Boron Carbon
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