(Dielectric Science & Technology Division Thomas D. Callinan Award)
Boron Carbon Nitride Thin Films for Low-k Dielectric Interconnect and
Optical Applications
Keyword(s):
Low K
◽
2007 ◽
Vol 253
(10)
◽
pp. 4814-4815
◽
Keyword(s):
Keyword(s):
2016 ◽
Vol 34
(4)
◽
pp. 040603
◽
Keyword(s):
2020 ◽
Vol 142
(49)
◽
pp. 20883-20891