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(Invited) Boron Carbon Nitride (BCN) Thin Films for Low-k Interdielectric Layer Applications
ECS Meeting Abstracts
◽
10.1149/ma2021-0214659mtgabs
◽
2021
◽
Vol MA2021-02
(14)
◽
pp. 659-659
Author(s):
Shraddha Dhanraj Nehate
◽
Kalpathy B. Sundaram
Keyword(s):
Thin Films
◽
Carbon Nitride
◽
Boron Carbon Nitride
◽
Low K
◽
Boron Carbon
Download Full-text
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Cited By
References
Hydrogenation of Boron Carbon Nitride Thin Films for Low-k Dielectric Applications
ECS Journal of Solid State Science and Technology
◽
10.1149/2162-8777/ac210d
◽
2021
◽
Author(s):
Shraddha Dhanraj Nehate
◽
Sreeram Sundaresh
◽
Robert Peale
◽
Kalpathy B. Sundaram
Keyword(s):
Thin Films
◽
Carbon Nitride
◽
Boron Carbon Nitride
◽
Low K
◽
Boron Carbon
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(Dielectric Science & Technology Division Thomas D. Callinan Award) Boron Carbon Nitride Thin Films for Low-k Dielectric Interconnect and Optical Applications
ECS Meeting Abstracts
◽
10.1149/ma2015-01/44/2284
◽
2015
◽
Keyword(s):
Thin Films
◽
Carbon Nitride
◽
Science Technology
◽
Optical Applications
◽
Boron Carbon Nitride
◽
Low K
◽
Boron Carbon
Download Full-text
Comment on Lihua Liu et al. “Preparation of boron carbon nitride thin films by radio frequency magnetron sputtering” [Appl. Surf. Sci. 252 (2006) 4185–4189]
Applied Surface Science
◽
10.1016/j.apsusc.2006.10.034
◽
2007
◽
Vol 253
(10)
◽
pp. 4814-4815
◽
Cited By ~ 1
Author(s):
V. Linss
Keyword(s):
Thin Films
◽
Magnetron Sputtering
◽
Radio Frequency
◽
Carbon Nitride
◽
Radio Frequency Magnetron
◽
Radio Frequency Magnetron Sputtering
◽
Boron Carbon Nitride
◽
Boron Carbon
Download Full-text
Nanoindentation and Photoluminescence Studies on Hydrogenated Boron Carbon Nitride Thin Films
ECS Meeting Abstracts
◽
10.1149/ma2021-01512007mtgabs
◽
2021
◽
Vol MA2021-01
(51)
◽
pp. 2007-2007
Author(s):
Shraddha Dhanraj Nehate
◽
Kalpathy B. Sundaram
Keyword(s):
Thin Films
◽
Carbon Nitride
◽
Photoluminescence Studies
◽
Boron Carbon Nitride
◽
Boron Carbon
Download Full-text
A brief overview of RF sputtering deposition of boron carbon nitride (BCN) thin films
Emergent Materials
◽
10.1007/s42247-018-0018-9
◽
2018
◽
Vol 2
(1)
◽
pp. 79-93
◽
Cited By ~ 3
Author(s):
Moustafa M. Zagho
◽
Hana D. Dawoud
◽
Nasr Bensalah
◽
T. M. Altahtamouni
Keyword(s):
Thin Films
◽
Carbon Nitride
◽
Rf Sputtering
◽
Sputtering Deposition
◽
Boron Carbon Nitride
◽
Boron Carbon
Download Full-text
Study of copper diffusion in RF magnetron sputtered boron carbon nitride thin films
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena
◽
10.1116/1.4948399
◽
2016
◽
Vol 34
(4)
◽
pp. 040603
◽
Cited By ~ 4
Author(s):
Adithya Prakash
◽
Kalpathy B. Sundaram
Keyword(s):
Thin Films
◽
Carbon Nitride
◽
Copper Diffusion
◽
Boron Carbon Nitride
◽
Boron Carbon
Download Full-text
Investigation on Electrical Properties of Hydrogen Doped Sputtered Boron Carbon Nitride Thin Films
ECS Meeting Abstracts
◽
10.1149/ma2019-01/45/2165
◽
2019
◽
Keyword(s):
Thin Films
◽
Electrical Properties
◽
Carbon Nitride
◽
Boron Carbon Nitride
◽
Boron Carbon
Download Full-text
Transition from amorphous boron carbide to hexagonal boron carbon nitride thin films induced by nitrogen ion assistance
Journal of Applied Physics
◽
10.1063/1.1512317
◽
2002
◽
Vol 92
(9)
◽
pp. 5177-5182
◽
Cited By ~ 35
Author(s):
R. Gago
◽
I. Jiménez
◽
F. Agulló-Rueda
◽
J. M Albella
◽
Zs. Czigány
◽
...
Keyword(s):
Thin Films
◽
Boron Carbide
◽
Carbon Nitride
◽
Amorphous Boron
◽
Nitrogen Ion
◽
Boron Carbon Nitride
◽
Ion Assistance
◽
Boron Carbon
Download Full-text
Boron carbon nitride film containing hydrogen for 2nm node low-k interconnection
2009 International Symposium on VLSI Technology, Systems, and Applications
◽
10.1109/vtsa.2009.5159270
◽
2009
◽
Author(s):
Hidemitsu Aoki
◽
Takuroh Masuzumi
◽
Makoto Hara
◽
Daisuke Watanabe
◽
Chiharu Kimura
◽
...
Keyword(s):
Carbon Nitride
◽
Nitride Film
◽
Carbon Nitride Film
◽
Boron Carbon Nitride
◽
Low K
◽
Boron Carbon
Download Full-text
Boron Carbon Nitride Thin Films: From Disordered to Ordered Conjugated Ternary Materials
Journal of the American Chemical Society
◽
10.1021/jacs.0c10945
◽
2020
◽
Vol 142
(49)
◽
pp. 20883-20891
Author(s):
Paolo Giusto
◽
Hiroki Arazoe
◽
Daniel Cruz
◽
Paola Lova
◽
Tobias Heil
◽
...
Keyword(s):
Thin Films
◽
Carbon Nitride
◽
Boron Carbon Nitride
◽
Boron Carbon
Download Full-text
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