Application of MEMS Technology to a Lightwave Antenna for Communication in Space and Aeronautics

2006 ◽  
Author(s):  
Yasushi Munemasa ◽  
Masatoshi Sano ◽  
Makoto Mita ◽  
Tadashi Takano
Keyword(s):  
Radiation Pattern ◽  
High Performance ◽  
Light Wave ◽  
Mechanical Systems ◽  
Optical Antenna ◽  
Curved Surfaces ◽  
Micro Electro Mechanical Systems ◽  
Measurement Results ◽  
Mems Technology ◽  
Power Radiation

This paper reports a novel MEMS (Micro Electro Mechanical Systems) lightwave (optical) antenna as a telecommunication device in space and aeronautics. The high performance antenna at light wave frequency requires optimal curved surfaces and high mechanical precision to acquire high aperture efficiency. We have developed a novel micro lightwave antenna by applying MEMS (Micro Electro Mechanical Systems) technology. The antenna of transparent type (lens) is fabricated as a trial antenna, which has a 3-level step structure with diameter of 4 mm, to show the advantage of the antenna. The characteristics of the fabricated antenna have been measured. The measurement results of gain and power radiation pattern are in agreement with simulation result.

scholarly journals Micro-electro-mechanical systems (MEMS): Technology for the 21st century

2014 ◽  
Vol 68 (5) ◽  
pp. 629-641 ◽  
Author(s):  
Tatjana Djakov ◽  
Ivanka Popovic ◽  
Ljubinka Rajakovic
Keyword(s):  
21St Century ◽  
Low Cost ◽  
Mechanical Systems ◽  
Modern Society ◽  
Global Scale ◽  
Thermal Constant ◽  
Mems Devices ◽  
Micro Electro Mechanical Systems ◽  
Industrial Sectors ◽  
Mems Technology

Micro-electro-mechanical systems (MEMS) are miniturized devices that can sense the environment, process and analyze information, and respond with a variety of mechanical and electrical actuators. MEMS consists of mechanical elements, sensors, actuators, electrical and electronics devices on a common silicon substrate. Micro-electro-mechanical systems are becoming a vital technology for modern society. Some of the advantages of MEMS devices are: very small size, very low power consumption, low cost, easy to integrate into systems or modify, small thermal constant, high resistance to vibration, shock and radiation, batch fabricated in large arrays, improved thermal expansion tolerance. MEMS technology is increasingly penetrating into our lives and improving quality of life, similar to what we experienced in the microelectronics revolution. Commercial opportunities for MEMS are rapidly growing in broad application areas, including biomedical, telecommunication, security, entertainment, aerospace, and more in both the consumer and industrial sectors on a global scale. As a breakthrough technology, MEMS is building synergy between previously unrelated fields such as biology and microelectronics. Many new MEMS and nanotechnology applications will emerge, expanding beyond that which is currently identified or known. MEMS are definitely technology for 21st century.

scholarly journals On-Demand MEMS Device Production System by Module-Based Microfactory

2010 ◽  
Vol 4 (2) ◽  
pp. 110-116 ◽  
Author(s):  
Kiwamu Ashida ◽  
◽  
Shizuka Nakano ◽  
Jaehyuk Park ◽  
Jun Akedo
Keyword(s):  
Production System ◽  
High Performance ◽  
Thin Sheet ◽  
Aerosol Deposition ◽  
Micro Electro Mechanical Systems ◽  
Unit Process ◽  
On Demand ◽  
Mems Technology ◽  
Thin Sheet Metal ◽  
Mems Device

Many micro-scale devices have been developed by applying micro-electro-mechanical systems (MEMS) technology, but MEMS production facilities are large and costly, making it difficult to develop small numbers of trial devices. The novel on-demand MEMS device production system we developed applies two major concepts – that of the microfactory and the introduction of non-MEMS processes in microfabrication. These two concepts have made manufacturing more ecological, economical, agile, and flexible through downsizing, forming an automated production line by connecting standardized unit-processing cells, each of which has a desktop process, a part transfer robot, and a standardized connection interface. These enable any process cell to be connected in any sequence that the target product requires. Four unit-process cells were developed – the micropress cell for fabricating microstructures from thin sheet metal and the miniature aerosol deposition (AD) process cell for fabricating high-performance piezoelectric (PZT) ceramics actuators. The feasibility of the on-demand MEMS production system was demonstrated by the fabrication of a MEMS-like micromirror scanner, proving the potential of on-demand MEMS production in diversified small-lot production.

scholarly journals High performance hard magnetic NdFeB thick films for integration into micro-electro-mechanical systems

2007 ◽  
Vol 90 (9) ◽  
pp. 092509 ◽  
Author(s):  
N. M. Dempsey ◽  
A. Walther ◽  
F. May ◽  
D. Givord ◽  
K. Khlopkov ◽  
...  
Keyword(s):  
High Performance ◽  
Thick Films ◽  
Mechanical Systems ◽  
Micro Electro Mechanical Systems

A Batch Fabricated Linear Synchronous Motor

2003 ◽  
Author(s):  
Martin Fo¨hse ◽  
Hans-D. Sto¨lting ◽  
Jens Edler ◽  
Hans H. Gatzen
Keyword(s):  
Mechanical Systems ◽  
Synchronous Motor ◽  
Micro Electro Mechanical Systems ◽  
Basic Approach ◽  
Linear Synchronous Motor ◽  
Mems Technology ◽  
Linear Actuators

Micro electro-mechanical systems (MEMS) technology opens up new ways of miniaturizing electromagnetic motors. A very promising approach for building miniature linear actuators is to fabricate the stator as well as the traveler separately and merging the motor components in a microassembly process [1]. This paper describes design, fabrication, and evaluation results of a linear synchronous actuator following this basic approach.

scholarly journals Toward Operations in a Surgical Scenario: Characterization of a Microgripper via Light Microscopy Approach

2019 ◽  
Vol 9 (9) ◽  
pp. 1901 ◽  
Author(s):  
Federica Vurchio ◽  
Pietro Ursi ◽  
Francesco Orsini ◽  
Andrea Scorza ◽  
Rocco Crescenzi ◽  
...  
Keyword(s):  
Electron Microscope ◽  
Statistical Analysis ◽  
Scanning Electron Microscope ◽  
Light Microscopy ◽  
Mechanical Systems ◽  
Optical Microscope ◽  
Micro Electro Mechanical Systems ◽  
Mems Technology ◽  
Scanning Electron

Micro Electro Mechanical Systems (MEMS)-Technology based micro mechanisms usually operate within a protected or encapsulated space and, before that, they are fabricated and analyzed within one Scanning Electron Microscope (SEM) vacuum specimen chamber. However, a surgical scenario is much more aggressive and requires several higher abilities in the microsystem, such as the capability of operating within a liquid or wet environment, accuracy, reliability and sophisticated packaging. Unfortunately, testing and characterizing MEMS experimentally without fundamental support of a SEM is rather challenging. This paper shows that in spite of large difficulties due to well-known physical limits, the optical microscope is still able to play an important role in MEMS characterization at room conditions. This outcome is supported by the statistical analysis of two series of measurements, obtained by a light trinocular microscope and a profilometer, respectively.

Design and characterization of an active recovering mechanism for high-performance RF MEMS redundancy switches

2011 ◽  
Vol 3 (5) ◽  
pp. 539-546 ◽  
Author(s):  
Francesco Solazzi ◽  
Augusto Tazzoli ◽  
Paola Farinelli ◽  
Alessandro Faes ◽  
Viviana Mulloni ◽  
...  
Keyword(s):  
High Performance ◽  
Rf Mems ◽  
Time To Failure ◽  
Micro Electro Mechanical Systems ◽  
Mems Switch ◽  
Rf Measurement ◽  
Switch Time ◽  
Measurement Results ◽  
Better Than

This paper presents the design and characterization of an active push/pull toggle RF micro-electro-mechanical systems (MEMS) switch for satellite redundancy networks. The actively controlled pull-up mechanism allows for extended restoring capabilities of the switch in case of ON-state stiction. As a proof of concept an active push/pull MEMS capacitive switch was modeled, designed, and manufactured in shunt configuration on a 50 Ω coplanar transmission line. RF measurement results show a return loss better than 15 dB in the 0.1–40 GHz range and an insertion loss better than 0.5 dB over the same range. The restoring capability of the switch was experimentally proved up to 9 h, and a predictive model was proposed for the estimation of the switch time to failure.

scholarly journals Nanofabrication, effects and sensors based on micro-electro-mechanical systems technology

2013 ◽  
Vol 371 (2000) ◽  
pp. 20120315 ◽  
Author(s):  
Yuelin Wang ◽  
Tie Li ◽  
Heng Yang
Keyword(s):  
Field Effect Transistors ◽  
Sacrificial Layer ◽  
High Surface ◽  
Mechanical Systems ◽  
Volume Ratio ◽  
High Specificity ◽  
Batch Process ◽  
Micro Electro Mechanical Systems ◽  
Mems Technology ◽  
20 Nm

In this paper, our investigation of nanofabrication, effects and sensors based on the traditional micro-electro-mechanical systems (MEMS) technology has been reviewed. Thanks to high selectivity in anisotropic etching and sacrificial layer processes, nanostructures such as nanobeams and nanowires have been fabricated in top-down batch process, in which beams with thickness of only 20 nm and nanowires whose width and thickness is only 20 nm were achieved. With the help of MEMS chip, the scale effect of Young's modulus in silicon has been studied and confirmed directly in a tensile experiment using electron microscopy. Because of their high surface-to-volume ratio and small size, silicon nanowire (SiNW)-based field-effect transistors (FETs) have been shown as one of the most promising electronic devices and ultrasensitive detectors in biological applications. We demonstrated that an SiNW–FET sensor can reveal ultrahigh sensitivity for rapid and reliable detection of 0.1 fM of target DNA with high specificity. All these indicate that the MEMS technology can pave the way to nanoapplications with its advantages of batch production, low cost and high performance.

A Review of Test Structures for Characterising Microelectronic and MEMS Technology

2008 ◽  
Vol 54 ◽  
pp. 356-365 ◽  
Author(s):  
Anthony J. Walton ◽  
Stewart Smith
Keyword(s):  
Contact Resistance ◽  
Mechanical Systems ◽  
Micro Electro Mechanical Systems ◽  
Mems Technology

This paper reviews present day test structures and illustrates how they have evolved to a continuously changing technology. Structures for measuring resistivity, contact resistance, feature dimensions and overlay errors are presented as are MEMS (Micro-Electro-Mechanical Systems)/microsystems specific devices.

Sign in / Sign up

Export Citation Format

Share Document