A Review of Test Structures for Characterising Microelectronic and MEMS Technology

2008 ◽  
Vol 54 ◽  
pp. 356-365 ◽  
Author(s):  
Anthony J. Walton ◽  
Stewart Smith
Keyword(s):  
Contact Resistance ◽  
Mechanical Systems ◽  
Micro Electro Mechanical Systems ◽  
Mems Technology

This paper reviews present day test structures and illustrates how they have evolved to a continuously changing technology. Structures for measuring resistivity, contact resistance, feature dimensions and overlay errors are presented as are MEMS (Micro-Electro-Mechanical Systems)/microsystems specific devices.

scholarly journals Micro-electro-mechanical systems (MEMS): Technology for the 21st century

2014 ◽  
Vol 68 (5) ◽  
pp. 629-641 ◽  
Author(s):  
Tatjana Djakov ◽  
Ivanka Popovic ◽  
Ljubinka Rajakovic
Keyword(s):  
21St Century ◽  
Low Cost ◽  
Mechanical Systems ◽  
Modern Society ◽  
Global Scale ◽  
Thermal Constant ◽  
Mems Devices ◽  
Micro Electro Mechanical Systems ◽  
Industrial Sectors ◽  
Mems Technology

Micro-electro-mechanical systems (MEMS) are miniturized devices that can sense the environment, process and analyze information, and respond with a variety of mechanical and electrical actuators. MEMS consists of mechanical elements, sensors, actuators, electrical and electronics devices on a common silicon substrate. Micro-electro-mechanical systems are becoming a vital technology for modern society. Some of the advantages of MEMS devices are: very small size, very low power consumption, low cost, easy to integrate into systems or modify, small thermal constant, high resistance to vibration, shock and radiation, batch fabricated in large arrays, improved thermal expansion tolerance. MEMS technology is increasingly penetrating into our lives and improving quality of life, similar to what we experienced in the microelectronics revolution. Commercial opportunities for MEMS are rapidly growing in broad application areas, including biomedical, telecommunication, security, entertainment, aerospace, and more in both the consumer and industrial sectors on a global scale. As a breakthrough technology, MEMS is building synergy between previously unrelated fields such as biology and microelectronics. Many new MEMS and nanotechnology applications will emerge, expanding beyond that which is currently identified or known. MEMS are definitely technology for 21st century.

A Batch Fabricated Linear Synchronous Motor

2003 ◽  
Author(s):  
Martin Fo¨hse ◽  
Hans-D. Sto¨lting ◽  
Jens Edler ◽  
Hans H. Gatzen
Keyword(s):  
Mechanical Systems ◽  
Synchronous Motor ◽  
Micro Electro Mechanical Systems ◽  
Basic Approach ◽  
Linear Synchronous Motor ◽  
Mems Technology ◽  
Linear Actuators

Micro electro-mechanical systems (MEMS) technology opens up new ways of miniaturizing electromagnetic motors. A very promising approach for building miniature linear actuators is to fabricate the stator as well as the traveler separately and merging the motor components in a microassembly process [1]. This paper describes design, fabrication, and evaluation results of a linear synchronous actuator following this basic approach.

scholarly journals Toward Operations in a Surgical Scenario: Characterization of a Microgripper via Light Microscopy Approach

2019 ◽  
Vol 9 (9) ◽  
pp. 1901 ◽  
Author(s):  
Federica Vurchio ◽  
Pietro Ursi ◽  
Francesco Orsini ◽  
Andrea Scorza ◽  
Rocco Crescenzi ◽  
...  
Keyword(s):  
Electron Microscope ◽  
Statistical Analysis ◽  
Scanning Electron Microscope ◽  
Light Microscopy ◽  
Mechanical Systems ◽  
Optical Microscope ◽  
Micro Electro Mechanical Systems ◽  
Mems Technology ◽  
Scanning Electron

Micro Electro Mechanical Systems (MEMS)-Technology based micro mechanisms usually operate within a protected or encapsulated space and, before that, they are fabricated and analyzed within one Scanning Electron Microscope (SEM) vacuum specimen chamber. However, a surgical scenario is much more aggressive and requires several higher abilities in the microsystem, such as the capability of operating within a liquid or wet environment, accuracy, reliability and sophisticated packaging. Unfortunately, testing and characterizing MEMS experimentally without fundamental support of a SEM is rather challenging. This paper shows that in spite of large difficulties due to well-known physical limits, the optical microscope is still able to play an important role in MEMS characterization at room conditions. This outcome is supported by the statistical analysis of two series of measurements, obtained by a light trinocular microscope and a profilometer, respectively.

scholarly journals Nanofabrication, effects and sensors based on micro-electro-mechanical systems technology

2013 ◽  
Vol 371 (2000) ◽  
pp. 20120315 ◽  
Author(s):  
Yuelin Wang ◽  
Tie Li ◽  
Heng Yang
Keyword(s):  
Field Effect Transistors ◽  
Sacrificial Layer ◽  
High Surface ◽  
Mechanical Systems ◽  
Volume Ratio ◽  
High Specificity ◽  
Batch Process ◽  
Micro Electro Mechanical Systems ◽  
Mems Technology ◽  
20 Nm

In this paper, our investigation of nanofabrication, effects and sensors based on the traditional micro-electro-mechanical systems (MEMS) technology has been reviewed. Thanks to high selectivity in anisotropic etching and sacrificial layer processes, nanostructures such as nanobeams and nanowires have been fabricated in top-down batch process, in which beams with thickness of only 20 nm and nanowires whose width and thickness is only 20 nm were achieved. With the help of MEMS chip, the scale effect of Young's modulus in silicon has been studied and confirmed directly in a tensile experiment using electron microscopy. Because of their high surface-to-volume ratio and small size, silicon nanowire (SiNW)-based field-effect transistors (FETs) have been shown as one of the most promising electronic devices and ultrasensitive detectors in biological applications. We demonstrated that an SiNW–FET sensor can reveal ultrahigh sensitivity for rapid and reliable detection of 0.1 fM of target DNA with high specificity. All these indicate that the MEMS technology can pave the way to nanoapplications with its advantages of batch production, low cost and high performance.

Application of MEMS Technology to a Lightwave Antenna for Communication in Space and Aeronautics

2006 ◽  
Author(s):  
Yasushi Munemasa ◽  
Masatoshi Sano ◽  
Makoto Mita ◽  
Tadashi Takano
Keyword(s):  
Radiation Pattern ◽  
High Performance ◽  
Light Wave ◽  
Mechanical Systems ◽  
Optical Antenna ◽  
Curved Surfaces ◽  
Micro Electro Mechanical Systems ◽  
Measurement Results ◽  
Mems Technology ◽  
Power Radiation

This paper reports a novel MEMS (Micro Electro Mechanical Systems) lightwave (optical) antenna as a telecommunication device in space and aeronautics. The high performance antenna at light wave frequency requires optimal curved surfaces and high mechanical precision to acquire high aperture efficiency. We have developed a novel micro lightwave antenna by applying MEMS (Micro Electro Mechanical Systems) technology. The antenna of transparent type (lens) is fabricated as a trial antenna, which has a 3-level step structure with diameter of 4 mm, to show the advantage of the antenna. The characteristics of the fabricated antenna have been measured. The measurement results of gain and power radiation pattern are in agreement with simulation result.

11. MEMS Seed Sorting Mechanism

2017 ◽  
Author(s):  
Marc Burnie
Keyword(s):  
Dielectric Properties ◽  
Electric Field ◽  
Mechanical Systems ◽  
Current Method ◽  
Micro Electro Mechanical Systems ◽  
Micro Scale ◽  
Mems Technology ◽  
Increase Productivity ◽  
Ultimate Objective

Seed sorting is an essential task in agriculture for maintaining the quality and purity of the yield. The current method for sorting seeds in the 50-200μm range is both tedious and inefficient. To increase productivity in the micro-scale an autonomous process using dielectrophoresis (DEP) selection techniques has been employed. By applying a controlled electric field, the seeds can be differentiated depending on their size and dielectric properties. Using existing Micro-Electro-Mechanical Systems (MEMS) technology, a preliminary working design was fabricated to prove the viability of the concept. Future iterations of the model will utilize counters and be fully automated with the ultimate objective of bringing the design to market.

Simulation of MEMS Capacitive Thermal Sensor Based on Tip Deflection of a Functionally Graded Micro-Beam

2013 ◽  
Vol 845 ◽  
pp. 340-344 ◽  
Author(s):  
Mohammad Abbasgholipour Ghadim ◽  
Musa Mailah ◽  
Behzad Mohammadi-Alasti ◽  
Mehdi Abbasgholipour Ghadim
Keyword(s):  
Simulation Study ◽  
Mechanical Systems ◽  
Beam Theory ◽  
Linearization Method ◽  
Functionally Graded ◽  
Thermal Sensor ◽  
Thermo Electric ◽  
Micro Electro Mechanical Systems ◽  
Mems Technology ◽  
Beam Deflections

This work presents a simulation study on a novel micro thermal sensor to evaluate a different range of temperature. Micro Electro Mechanical Systems (MEMS) technology is an interesting field in mechanics andmetrology. In this work, a capacitive micro thermal sensor based on tip deflection of Functionally Graded Micro-beam (FGM) was designed. The thermo-electric mechanical equations based on Euler-Bernoulli beam theory were derived and solved using step-by-step linearization method. The increase in temperature was expressed with respect to the changes in the capacitance. The beam deflections were compared with the existing results showing good conformity with the highest error obtained as 4.3% at 65°C.

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