Analysis of the effect of germanium preamorphization on interface defects and leakage current for high-k metal-oxide-semiconductor field-effect transistor

Author(s):  
G. Roll ◽  
S. Jakschik ◽  
M. Goldbach ◽  
A. Wachowiak ◽  
T. Mikolajick ◽  
...  
2004 ◽  
Vol 85 (7) ◽  
pp. 1286-1288 ◽  
Author(s):  
Se Jong Rhee ◽  
Chang Yong Kang ◽  
Chang Seok Kang ◽  
Rino Choi ◽  
Chang Hwan Choi ◽  
...  

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