Improving the quality of barrier/seed interface by optimizing physical vapor deposition of Cu Film in hollow cathode magnetron

2011 ◽  
Vol 29 (4) ◽  
pp. 041514 ◽  
Author(s):  
A. Dulkin ◽  
E. Ko ◽  
L. Wu ◽  
I. Karim ◽  
K. Leeser ◽  
...  
Keyword(s):  
Hollow Cathode ◽  
Vapor Deposition ◽  
Physical Vapor Deposition ◽  
Cu Film

Ionized physical-vapor deposition using a hollow-cathode magnetron source for advanced metallization

2000 ◽  
Vol 18 (4) ◽  
pp. 1546-1549 ◽  
Author(s):  
E. Klawuhn ◽  
G. C. D’Couto ◽  
K. A. Ashtiani ◽  
P. Rymer ◽  
M. A. Biberger ◽  
...  
Keyword(s):  
Hollow Cathode ◽  
Vapor Deposition ◽  
Physical Vapor Deposition ◽  
Ionized Physical Vapor Deposition

Improvement and Sensitivity Analysis of Placement Angle Optimization in Physical Vapor Deposition Process

2012 ◽  
Vol 602-604 ◽  
pp. 1652-1658
Author(s):  
Temsiri Sapsaman ◽  
Sasithon Bland
Keyword(s):  
Vapor Deposition ◽  
Physical Vapor Deposition ◽  
Degrees Of Freedom ◽  
Deposition Process ◽  
High Energy ◽  
Optimal Placement ◽  
Coating Film ◽  
Energy Beam ◽  
Pvd Coating

Widely used to improve the lifespan of tools, Physical Vapor Deposition (PVD) coating process yields hard coating film by creating high-energy beam of coating particles or plasma ions. The quality of the coat is largely depended on its evenness, which is achieved solely by the know-how and experience of coating companies. In dealing with a large, unfamiliar-shape workpiece, coating companies need a logical way to determine the optimal placement of the workpiece in the PVD oven. This work presents the improvement of placement angle optimization for a five-degrees-of-freedom jig fixture with self-rotation. The sensitivity of errors in the physical placement is found to be small.

scholarly journals Effect of Grain Size and Micromorphology of Cu Foil on the Velocity of Flyer of Exploding Foil Detonator

2021 ◽  
Vol 11 (14) ◽  
pp. 6598
Author(s):  
Kehua Han ◽  
Peng Deng ◽  
Enyi Chu ◽  
Qingjie Jiao
Keyword(s):  
Grain Size ◽  
Energy Conversion ◽  
Current Density ◽  
Vapor Deposition ◽  
Physical Vapor Deposition ◽  
Stimulus Response ◽  
The Core ◽  
Grain Sizes ◽  
Cu Film ◽  
Cu Foil

In this paper, the effect of grain size and micromorphology of Cu foil on the velocity of the flyer of an exploding foil detonator was studied. A Cu foil with different grain sizes and micromorphologies was prepared by the physical vapor deposition sputtering method. The flyer velocity of the Cu foil was measured by the photon Doppler technique (PDT). The influence of the grain size and micromorphology of the Cu foil (which was the core transducer of the exploding foil detonator) on the flyer velocity and reacted morphology was discussed. The results show that the grain size and micromorphology of the Cu film can greatly affect the velocity and morphology of the flyer. The grain size of the Cu film is more uniform, and the stimulus response in the middle area of the bridge foil is more concentrated. In addition, the current density becomes more uniform, resulting in a better explosion performance. Consequently, the speed of the formed flyer becomes higher, leading to a smoother flyer surface, which is more conductive to energy conversion.

Study on the Surface Treatment of Special Screw for Light Guiding Plate’s Precision Injection Molding

2011 ◽  
Vol 221 ◽  
pp. 123-128
Author(s):  
Gang Gou ◽  
Peng Cheng Xie ◽  
Zhen Xing Wen ◽  
Yu Mei Ding ◽  
Wei Min Yang
Keyword(s):  
Injection Molding ◽  
Surface Quality ◽  
Vapor Deposition ◽  
Physical Vapor Deposition ◽  
Adhesion Force ◽  
Performance Testing ◽  
Bonding Force ◽  
Good Surface ◽  
Black Spots

Defects such as black spots and yellow surfaces appeared in the process of injection molding light guiding plate as a result of the failure surfaces of the screw and screw tip. To choose and optimize the solutions of different surface treatments of the special screw for light guiding plate, the stripping performance testing platform was established. The experimental results showed that TiN and TiAlN or similar coatings by physical vapor deposition could significantly reduce the adhesion force between polycarbonate (PC) and different coatings. Through surface topography analysis of diversified coatings with SEM and AFM, TiAlN coatings represented the excellent surface quality of its smoothness, continuum, and low surface wave. To enhance the bonding force between the molding screw and coatings, TiAlN/Cr and TiAlN/Ti multi-films was developed which owned much more firm bonding force than TiAlN and good surface quality to be suitable for the special screw for manufacturing light guiding plate.

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