In situ diagnostics for studying gas-surface reactions during thermal and plasma-assisted atomic layer deposition
2012 ◽
Vol 30
(1)
◽
pp. 01A158
◽
Keyword(s):
2012 ◽
Vol 83
(8)
◽
pp. 083106
◽
Keyword(s):
1997 ◽
Vol 112
◽
pp. 82-86
◽
Keyword(s):
Keyword(s):
Keyword(s):
2017 ◽
Vol 9
(18)
◽
pp. 15848-15856
◽
Keyword(s):
2017 ◽
Vol 422
◽
pp. 666-674
◽
2020 ◽
Vol 124
(49)
◽
pp. 27250-27250
Keyword(s):
2009 ◽
Vol 113
(19)
◽
pp. 8249-8257
◽
Keyword(s):