In situ infrared spectroscopy study of the surface reactions during the atomic layer deposition of TiO2 on GaAs (100) surfaces
2017 ◽
Vol 422
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pp. 666-674
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2014 ◽
Vol 118
(11)
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pp. 5862-5871
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2018 ◽
Vol 36
(3)
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pp. 031513
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2015 ◽
Vol 27
(14)
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pp. 4943-4949
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2012 ◽
Vol 30
(1)
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pp. 01A158
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2018 ◽
Vol 20
(39)
◽
pp. 25343-25356
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