Application of spectral ellipsometry to in situ diagnostics of atomic layer deposition of dielectrics on silicon and AlGaN
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2012 ◽
Vol 83
(8)
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pp. 083106
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1997 ◽
Vol 112
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pp. 82-86
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2012 ◽
Vol 30
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pp. 01A158
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2009 ◽
Vol 113
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pp. 8249-8257
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2018 ◽
Vol 89
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pp. 123702
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