Electronic and optical device applications of hollow cathode plasma assisted atomic layer deposition based GaN thin films
2015 ◽
Vol 33
(1)
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pp. 01A143
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2014 ◽
Vol 32
(3)
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pp. 031508
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Keyword(s):
2020 ◽
Vol 38
(6)
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pp. 062407
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2016 ◽
Vol 31
(7)
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pp. 075003
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2015 ◽
Vol 12
(4-5)
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pp. 394-398
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2016 ◽
Vol 34
(1)
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pp. 01A125
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Keyword(s):
2014 ◽
Vol 2
(12)
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pp. 2123-2136
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