Pilot-scale electron cyclotron resonance-metal organic chemical vapor deposition system for the preparation of large-area fluorine-doped SnO2 thin films

Chemical Vapor ◽

Pilot Scale ◽

Organic Chemical ◽

Large Area ◽

Metal Organic ◽

Sno2 Thin Films ◽

New Developments and Application in Chemical Reaction Engineering - Studies in Surface Science and Catalysis ◽

Characteristics of Tin Oxide Thin Films on a Poly Ethylene Terephthalate Substrate Prepared by Electron Cyclotron Resonance-Metal Organic Chemical Vapor Deposition

10.1016/s0167-2991(06)81614-9 ◽

2006 ◽

pp. 385-388 ◽

Cited By ~ 1

Author(s):

Y. H Kook ◽

D. J Byun ◽

B. J Jeon ◽

J. K Lee

Keyword(s):

Tin Oxide ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Chemical Vapor ◽

Organic Chemical ◽

Poly Ethylene Terephthalate ◽

Metal Organic ◽

Poly Ethylene ◽

Mass spectroscopic study for vaporization characteristics of Ba(TMHD)2 and Sr(TMHD)2 in electron cyclotron resonance-plasma enhanced metal organic chemical vapor deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.580479 ◽

1997 ◽

Vol 15 (1) ◽

pp. 72-76 ◽

Cited By ~ 6

Author(s):

Joon Sung Lee ◽

Han Wook Song ◽

Kyong Sub Kim ◽

Byoung Gon Yu ◽

Yon Ho Jeong ◽

...

Keyword(s):

Vapor Deposition ◽

Cyclotron Resonance ◽

Chemical Vapor ◽

Organic Chemical ◽

Metal Organic ◽

Resonance Plasma ◽

Mass Spectroscopic Study

Structural and Electrical Characteristics of Gallium Tin Oxide Thin Films Prepared by Electron Cyclotron Resonance-Metal Organic Chemical Vapor Deposition

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2011.4840 ◽

2011 ◽

Vol 11 (8) ◽

pp. 7234-7237

Author(s):

Ji Hun Park ◽

Dongjin Byun ◽

Joong Kee Lee

Keyword(s):

Thin Films ◽

Tin Oxide ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Chemical Vapor ◽

Organic Chemical ◽

Electrical Characteristics ◽

Metal Organic ◽

Fluorine doped gallium tin oxide composite films as transparent conductive oxides on polyethylene terephthalate film prepared by electron cyclotron resonance metal organic chemical vapor deposition

Thin Solid Films ◽

10.1016/j.tsf.2011.04.048 ◽

2011 ◽

Vol 519 (20) ◽

pp. 6863-6867 ◽

Cited By ~ 13

Author(s):

Ji Hun Park ◽

Samseok Jang ◽

Dongjin Byun ◽

Joong Kee Lee

Keyword(s):

Tin Oxide ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Composite Films ◽

Chemical Vapor ◽

Organic Chemical ◽

Polyethylene Terephthalate Film ◽

Metal Organic ◽

Effects of precursor evaporation temperature on the properties of the yttrium oxide thin films deposited by microwave electron cyclotron resonance plasma assisted metal organic chemical vapor deposition

Thin Solid Films ◽

10.1016/j.tsf.2010.12.004 ◽

2011 ◽

Vol 519 (10) ◽

pp. 3011-3020 ◽

Cited By ~ 17

Author(s):

S.A. Barve ◽

Jagannath ◽

N. Mithal ◽

M.N. Deo ◽

A. Biswas ◽

...

Keyword(s):

Thin Films ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Chemical Vapor ◽

Organic Chemical ◽

Evaporation Temperature ◽

Metal Organic ◽

Effect of hydrogen content on the ZnO thin films on the surface of polyethylene terephthalate substrate through electron cyclotron resonance-metal organic chemical vapor deposition

Journal of Materials Science ◽

10.1007/s10853-008-2463-y ◽

2008 ◽

Vol 43 (10) ◽

pp. 3417-3423 ◽

Cited By ~ 11

Author(s):

J. H. Park ◽

D. Byun ◽

B. J. Jeon ◽

J. K. Lee

Keyword(s):

Thin Films ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Chemical Vapor ◽

Zno Thin Films ◽

Organic Chemical ◽

Metal Organic ◽

Polyethylene Terephthalate Substrate ◽

Enhancement of Ru Nucleation in Ru-Metal Organic Chemical Vapor Deposition by Electron Cyclotron Resonance Plasma Pretreatment

Japanese Journal of Applied Physics ◽

10.1143/jjap.42.5539 ◽

2003 ◽

Vol 42 (Part 1, No. 9A) ◽

pp. 5539-5542 ◽

Cited By ~ 2

Author(s):

Kyunsuk Choi ◽

Jongmin Lim ◽

Sudipta Roy ◽

Chongmu Lee

Keyword(s):

Vapor Deposition ◽

Cyclotron Resonance ◽

Chemical Vapor ◽

Organic Chemical ◽

Plasma Pretreatment ◽

Metal Organic ◽

Adhesion characteristics of copper thin film deposited on PET substrate by electron cyclotron resonance–metal organic chemical vapor deposition

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2007.08.015 ◽

2008 ◽

Vol 202 (9) ◽

pp. 1839-1846 ◽

Cited By ~ 13

Author(s):

Bup Ju Jeon ◽

Sangwha Lee ◽

Joong Kee Lee

Keyword(s):

Thin Film ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Chemical Vapor ◽

Organic Chemical ◽

Copper Thin Film ◽

Metal Organic ◽

Pet Substrate

Effects of Sr/Ti Ratio on the Step Coverage of SrTiO3Thin Films Fabricated Using Electron Cyclotron Resonance Plasma Enhanced Metal Organic Chemical Vapor Deposition

Japanese Journal of Applied Physics ◽

10.1143/jjap.40.2456 ◽

2001 ◽

Vol 40 (Part 1, No. 4A) ◽

pp. 2456-2459 ◽

Cited By ~ 2

Author(s):

Soon Yon Park ◽

Jongwan Choi ◽

Kwangsoo No

Keyword(s):

Vapor Deposition ◽

Cyclotron Resonance ◽

Chemical Vapor ◽

Electron Cyclotron ◽

Organic Chemical ◽

Metal Organic ◽

Dependence of the properties of (SrxTi1−x)O3 thin films deposited by plasma-enhanced metal–organic chemical vapor deposition on electron cyclotron resonance plasma

Thin Solid Films ◽

10.1016/s0040-6090(97)00002-3 ◽

1997 ◽

Vol 301 (1-2) ◽

pp. 154-161 ◽

Cited By ~ 5

Author(s):

Joon Sung Lee ◽

Han Wook Song ◽

Byung-Hyuk Jun ◽

Dong Hwa Kwack ◽

Byoung Gon Yu ◽

...

Keyword(s):

Thin Films ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Chemical Vapor ◽

Organic Chemical ◽

Metal Organic ◽