Effect of hydrogen content on the ZnO thin films on the surface of polyethylene terephthalate substrate through electron cyclotron resonance-metal organic chemical vapor deposition

Journal of Materials Science ◽

10.1007/s10853-008-2463-y ◽

2008 ◽

Vol 43 (10) ◽

pp. 3417-3423 ◽

Author(s):

J. H. Park ◽

D. Byun ◽

B. J. Jeon ◽

J. K. Lee

Keyword(s):

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Zno Thin Films ◽

Organic Chemical ◽

Metal Organic ◽

Polyethylene Terephthalate Substrate ◽

Organic Chemical Vapor Deposition

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Structural and Electrical Characteristics of Gallium Tin Oxide Thin Films Prepared by Electron Cyclotron Resonance-Metal Organic Chemical Vapor Deposition

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2011.4840 ◽

2011 ◽

Vol 11 (8) ◽

pp. 7234-7237

Author(s):

Ji Hun Park ◽

Dongjin Byun ◽

Joong Kee Lee

Keyword(s):

Tin Oxide ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Organic Chemical ◽

Electrical Characteristics ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Effects of precursor evaporation temperature on the properties of the yttrium oxide thin films deposited by microwave electron cyclotron resonance plasma assisted metal organic chemical vapor deposition

Thin Solid Films ◽

10.1016/j.tsf.2010.12.004 ◽

2011 ◽

Vol 519 (10) ◽

pp. 3011-3020 ◽

Author(s):

S.A. Barve ◽

Jagannath ◽

N. Mithal ◽

M.N. Deo ◽

A. Biswas ◽

...

Keyword(s):

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Organic Chemical ◽

Evaporation Temperature ◽

Metal Organic ◽

Organic Chemical Vapor Deposition ◽

Resonance Plasma

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Dependence of the properties of (SrxTi1−x)O3 thin films deposited by plasma-enhanced metal–organic chemical vapor deposition on electron cyclotron resonance plasma

Thin Solid Films ◽

10.1016/s0040-6090(97)00002-3 ◽

1997 ◽

Vol 301 (1-2) ◽

pp. 154-161 ◽

Author(s):

Joon Sung Lee ◽

Han Wook Song ◽

Byung-Hyuk Jun ◽

Dong Hwa Kwack ◽

Byoung Gon Yu ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Organic Chemical ◽

Metal Organic ◽

Organic Chemical Vapor Deposition ◽

Resonance Plasma

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Pilot-scale electron cyclotron resonance-metal organic chemical vapor deposition system for the preparation of large-area fluorine-doped SnO2 thin films

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.4943389 ◽

2016 ◽

Vol 34 (3) ◽

pp. 031501 ◽

Author(s):

Bup Ju Jeon ◽

Chairul Hudaya ◽

Joong Kee Lee

Keyword(s):

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Pilot Scale ◽

Organic Chemical ◽

Metal Organic ◽

Sno2 Thin Films ◽

Organic Chemical Vapor Deposition

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Unintentional doping and compensation effects of carbon in metal-organic chemical-vapor deposition fabricated ZnO thin films

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.2167981 ◽

2006 ◽

Vol 24 (4) ◽

pp. 1213-1217 ◽

Author(s):

Xiaonan Li ◽

Sally E. Asher ◽

Sukit Limpijumnong ◽

S. B. Zhang ◽

Su-Huai Wei ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Zno Thin Films ◽

Organic Chemical ◽

Unintentional Doping ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Characteristics of Tin Oxide Thin Films on a Poly Ethylene Terephthalate Substrate Prepared by Electron Cyclotron Resonance-Metal Organic Chemical Vapor Deposition

New Developments and Application in Chemical Reaction Engineering - Studies in Surface Science and Catalysis ◽

10.1016/s0167-2991(06)81614-9 ◽

2006 ◽

pp. 385-388 ◽

Author(s):

Y. H Kook ◽

D. J Byun ◽

B. J Jeon ◽

J. K Lee

Keyword(s):

Tin Oxide ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Organic Chemical ◽

Poly Ethylene Terephthalate ◽

Metal Organic ◽

Poly Ethylene ◽

Organic Chemical Vapor Deposition

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Thickness dependence of microstructure and properties of ZnO thin films deposited by metal-organic chemical vapor deposition using ultrasonic nebulization

Thin Solid Films ◽

10.1016/j.tsf.2013.05.029 ◽

2013 ◽

Vol 546 ◽

pp. 38-41 ◽

Author(s):

Choon-Ho Lee ◽

Do-Woo Kim

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Thickness Dependence ◽

Zno Thin Films ◽

Organic Chemical ◽

Ultrasonic Nebulization ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Effects of annealing treatment on the formation of CO2 in ZnO thin films grown by metal-organic chemical vapor deposition

Applied Surface Science ◽

10.1016/j.apsusc.2009.10.109 ◽

2010 ◽

Vol 256 (8) ◽

pp. 2606-2610 ◽

Author(s):

Gaolin Zheng ◽

Anli Yang ◽

Hongyuan Wei ◽

Xianglin Liu ◽

Huaping Song ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Annealing Treatment ◽

Chemical Vapor ◽

Zno Thin Films ◽

Organic Chemical ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Thermally stable transparent conducting and highly infrared reflective Ga-doped ZnO thin films by metal organic chemical vapor deposition

Optical Materials ◽

10.1016/j.optmat.2010.12.008 ◽

2011 ◽

Vol 33 (6) ◽

pp. 768-772 ◽

Author(s):

J.L. Zhao ◽

X.W. Sun ◽

H. Ryu ◽

Y.B. Moon

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Zno Thin Films ◽

Organic Chemical ◽

Transparent Conducting ◽

Metal Organic ◽

Doped Zno ◽

Organic Chemical Vapor Deposition

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Growth of a-plane ZnO thin films on LaAlO3(100) substrate by metal-organic chemical vapor deposition

Journal of Crystal Growth ◽

10.1016/j.jcrysgro.2007.11.073 ◽

2008 ◽

Vol 310 (4) ◽

pp. 777-782 ◽

Author(s):

Jr-Sheng Tian ◽

Mei-Hui Liang ◽

Yen-Teng Ho ◽

Yuan-An Liu ◽

Li Chang

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Zno Thin Films ◽

Organic Chemical ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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