Mechanical properties of boron nitride thin films prepared by atomic layer deposition
Keyword(s):
Unravelling the relation between heat treatments and resulting mechanical properties of boron nitride thin films prepared by ALD.
2005 ◽
Vol 11
(6-7)
◽
pp. 330-337
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Keyword(s):
Keyword(s):
Electron-Enhanced Atomic Layer Deposition of Boron Nitride Thin Films at Room Temperature and 100 °C
2018 ◽
Vol 122
(17)
◽
pp. 9455-9464
◽
Keyword(s):
Keyword(s):
2015 ◽
Vol 764-765
◽
pp. 138-142
◽
Keyword(s):