Characterization of reactively magnetron sputtered hydrogenated amorphous silicon films
1986 ◽
Vol 4
(4)
◽
pp. 1855-1860
◽
Keyword(s):
1994 ◽
1981 ◽
1991 ◽
Vol 30
(Part 2, No. 11B)
◽
pp. L1914-L1916
◽
1991 ◽
Vol 79
(8)
◽
pp. 687-691
◽
Keyword(s):