Summary Abstract: Structure and properties of nitride thin films grown by magnetron sputter deposition: Effects of ion irradiation during growth
1988 ◽
Vol 6
(3)
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pp. 1694-1695
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1996 ◽
Vol 80
(1-2)
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pp. 190-194
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1993 ◽
Vol 60
(1-3)
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pp. 480-483
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2018 ◽
Vol 5
(3)
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pp. 036410
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Keyword(s):
2009 ◽
Vol 48
(4)
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pp. 04C139
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2009 ◽
Vol 12
(4)
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pp. H109
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Keyword(s):
2006 ◽