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Process effects on structural properties of TiO2 thin films by reactive sputtering
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
◽
10.1116/1.578269
◽
1992
◽
Vol 10
(4)
◽
pp. 1479-1482
◽
Cited By ~ 112
Author(s):
Dwi Wicaksana
◽
Akihiko Kobayashi
◽
Akira Kinbara
Keyword(s):
Thin Films
◽
Structural Properties
◽
Reactive Sputtering
◽
Tio2 Thin Films
◽
Process Effects
Download Full-text
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Annealing effects on optical and structural properties of TiO2 thin films deposited by ion beam sputtering
Tenth International Conference on Thin Film Physics and Applications (TFPA 2019)
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10.1117/12.2539044
◽
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◽
Author(s):
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◽
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◽
Annealing Effects
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Effect of total gas pressure and O2/N2 flow rate on the nanostructure of N-doped TiO2 thin films deposited by reactive sputtering
Thin Solid Films
◽
10.1016/j.tsf.2013.11.111
◽
2014
◽
Vol 552
◽
pp. 10-17
◽
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◽
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Gas Pressure
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◽
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Effect of Thermal Annealing on Structural Properties, Morphologies and Electrical Properties of TiO2 Thin Films Grown by MOCVD
Crystal Research and Technology
◽
10.1002/1521-4079(200205)37:5<431::aid-crat431>3.0.co;2-d
◽
2002
◽
Vol 37
(5)
◽
pp. 431
◽
Cited By ~ 11
Author(s):
X. H. Xu
◽
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◽
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Thin Films
◽
Electrical Properties
◽
Structural Properties
◽
Thermal Annealing
◽
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Effect of substrate temperature on structural properties and photocatalytic activity of TiO2 thin films
Transactions of Nonferrous Metals Society of China
◽
10.1016/s1003-6326(07)60172-1
◽
2007
◽
Vol 17
(4)
◽
pp. 772-776
◽
Cited By ~ 20
Author(s):
Lei ZHAO
◽
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Photocatalytic Activity
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Photocatalytic activity studies of TiO2 thin films prepared by r.f. magnetron reactive sputtering
Vacuum
◽
10.1016/s0042-207x(03)00104-0
◽
2003
◽
Vol 72
(1)
◽
pp. 79-84
◽
Cited By ~ 26
Author(s):
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◽
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◽
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◽
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◽
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◽
Photocatalytic Activity
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Reactive Sputtering
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Optical and structural properties of nanocrystalline anatase (TiO2) thin films prepared by non-aqueous sol-gel dip-coating
Thin Solid Films
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10.1016/j.tsf.2011.02.091
◽
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◽
Vol 519
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◽
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◽
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◽
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◽
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◽
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◽
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◽
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◽
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◽
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◽
Dip Coating
◽
Anatase Tio2
◽
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◽
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Reactive sputtering deposition of photocatalytic TiO2 thin films on glass substrates
Materials Science and Engineering B
◽
10.1016/j.mseb.2005.11.043
◽
2007
◽
Vol 138
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◽
pp. 139-143
◽
Cited By ~ 58
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◽
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◽
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◽
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Reactive Sputtering
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◽
Sputtering Deposition
◽
Glass Substrates
◽
Photocatalytic Tio2
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Enhanced optical & structural properties by potassium iodide doping on spin coated TiO2 thin films
Chemical Data Collections
◽
10.1016/j.cdc.2020.100494
◽
2020
◽
Vol 29
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pp. 100494
Author(s):
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◽
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Dye degradation studies on Cu-doped TiO2 thin films developed by reactive sputtering
10.1063/1.5130343
◽
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◽
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◽
S. Sanjeevi Prasath
◽
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◽
Reactive Sputtering
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Tio2 Thin Films
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Degradation Studies
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Correlation of structural properties with energy transfer of Eu-doped ZnO thin films prepared by sol-gel process and magnetron reactive sputtering
Journal of Applied Physics
◽
10.1063/1.3436628
◽
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