Nanostructural characterization of thin‐film transistors using a combination of scanning force microscopy and transmission electron microscopy

1996 ◽  
Vol 14 (3) ◽  
pp. 1714-1718 ◽  
Author(s):  
S. Tsuji ◽  
T. Tsujimura ◽  
K. Tsujimoto ◽  
N. Tsutsui ◽  
N. Miura ◽  
...  
Sign in / Sign up

Export Citation Format

Share Document