Assessment of as-deposited microcrystalline silicon films on polymer substrates using electron cyclotron resonance-plasma enhanced chemical vapor deposition
1999 ◽
Vol 17
(4)
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pp. 1987-1990
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1997 ◽
Vol 36
(Part 1, No. 1A)
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pp. 38-49
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2002 ◽
Vol 235
(1-4)
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pp. 333-339
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1996 ◽
Vol 14
(3)
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pp. 1687
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1995 ◽
Vol 05
(C5)
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pp. C5-671-C5-677
1998 ◽
Vol 16
(3)
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pp. 1912-1916
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1997 ◽
Vol 292
(1-2)
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pp. 124-129
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1995 ◽
Vol 13
(1)
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pp. 118
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