Design of a 300 mm chemical vapor deposition tungsten reactor using computational fluid dynamics
1999 ◽
Vol 17
(4)
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pp. 1352-1355
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1999 ◽
Vol 146
(5)
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pp. 1780-1788
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1994 ◽
Vol 12
(4)
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pp. 2752
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2013 ◽
Vol 2
(11)
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pp. P457-P464
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2016 ◽
Vol 4
(4)
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pp. 863-871
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2018 ◽
Vol 33
(9)
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pp. 1308-1308
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2018 ◽
Vol 33
(9)
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pp. 1088-1108
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