Reduction of GaAs metal–semiconductor field effect transistor sidegating by ultraviolet/ozone cleanup prior to molecular-beam epitaxial growth
1989 ◽
Vol 7
(4)
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pp. 680
◽
1993 ◽
Vol 11
(3)
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pp. 601
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Keyword(s):
1993 ◽
Vol 127
(1-4)
◽
pp. 29-35
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1997 ◽
Vol 175-176
◽
pp. 883-887
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