Superconformal chemical vapor deposition using plasma-generated atomic species as a consumable growth inhibitor
2021 ◽
Vol 39
(4)
◽
pp. 043409
Keyword(s):
2019 ◽
Vol 37
(2)
◽
pp. 021509
◽
2021 ◽
Vol 39
(2)
◽
pp. 023414
Keyword(s):
Keyword(s):
1995 ◽
Vol 53
◽
pp. 256-257
Keyword(s):
1989 ◽
Vol 47
◽
pp. 608-609
2001 ◽
Vol 11
(PR3)
◽
pp. Pr3-885-Pr3-892
◽
Keyword(s):
2001 ◽
Vol 11
(PR3)
◽
pp. Pr3-691-Pr3-702
2002 ◽
Vol 12
(4)
◽
pp. 69-74
◽
1989 ◽
Vol 50
(C5)
◽
pp. C5-667-C5-672