Thin films residual stress profile evaluation using test microstructures: Illustrated on an example of AlN film
2021 ◽
Vol 39
(3)
◽
pp. 033001
Keyword(s):
2000 ◽
Vol 123
(2)
◽
pp. 162-168
◽
2020 ◽
pp. 095440542096120
2005 ◽
pp. 328-331
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Keyword(s):
2017 ◽
Vol 232
(12)
◽
pp. 2132-2139
◽