As-deposited properties and rapid thermal annealing effects on Ti/TiN barrier layer for aluminum plug technology

1994 ◽  
Author(s):  
De-Dui Liao ◽  
Yih-Shung Lin ◽  
Hong Yang ◽  
Howard Witham ◽  
Javier Saenz ◽  
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Keyword(s):  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Barrier Layer ◽  
Annealing Effects

Rapid Thermal Annealing Effects in CdTe (111) Thin Films Grown on GaAs (100) Substrates

1996 ◽  
Vol 35 (Part 1, No. 8) ◽  
pp. 4220-4224 ◽  
Author(s):  
M. D. Kim ◽  
T. W. Kang ◽  
M. S. Han ◽  
T. W. Kim
Keyword(s):  
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Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Annealing Effects

Rapid thermal annealing effects on blue luminescence of As-implanted GaN

2002 ◽  
Vol 92 (7) ◽  
pp. 4129-4131 ◽  
Author(s):  
H. Y. Huang ◽  
J. Q. Xiao ◽  
C. S. Ku ◽  
H. M. Chung ◽  
W. K. Chen ◽  
...  
Keyword(s):  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Blue Luminescence ◽  
Annealing Effects

Rapid thermal annealing effects on the properties of plasma‐enhanced chemical vapor deposited tungsten films

1991 ◽  
Vol 70 (4) ◽  
pp. 2366-2369 ◽  
Author(s):  
Jong‐Sung Hong ◽  
Yong Tae Kim ◽  
Suk‐Ki Min ◽  
Tae Won Kang ◽  
Chi Yhou Hong
Keyword(s):  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Chemical Vapor ◽  
Chemical Vapor Deposited ◽  
Annealing Effects

Rapid thermal annealing effects on the electrical, structural and morphological properties of Yb/p-type InP Schottky Structure

2015 ◽  
Vol 11 (1) ◽  
pp. 73-81 ◽  
Author(s):  
V. Rajagopal Reddy ◽  
D. Sri Silpa ◽  
V. Janardhanam ◽  
Hyung-Joong Yun ◽  
Chel-Jong Choi
Keyword(s):  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Morphological Properties ◽  
Annealing Effects ◽  
P Type ◽  
Schottky Structure

scholarly journals Rapid thermal annealing effects on plasma deposited SiOx:H films

Vacuum ◽  
2002 ◽  
Vol 67 (3-4) ◽  
pp. 531-536 ◽  
Author(s):  
E San Andrés ◽  
A del Prado ◽  
I Mártil ◽  
G González Dı́az ◽  
F.L Martinez ◽  
...  
Keyword(s):  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Annealing Effects
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