Surface finish in ultra-precision diamond turning of single-crystal silicon
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2021 ◽
2001 ◽
Vol 25
(4)
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pp. 247-257
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1999 ◽
Vol 65
(10)
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pp. 1512-1516
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2002 ◽
Vol 68
(4)
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pp. 561-565
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2007 ◽
Vol 2007.4
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pp. 9C341
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2019 ◽
Vol 103
(9-12)
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pp. 4205-4220
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2007 ◽
Vol 2007
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pp. 123-124
2016 ◽
Vol 2016.11
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pp. C01
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2017 ◽
Vol 115
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pp. 2-14
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2015 ◽
Vol 28
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pp. 1273-1280
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