"Non-destructive" dimensional metrology of EUV resist gratings (Conference Presentation)

2019 ◽

Author(s):

Herminso Villaraga-Gómez ◽

Joshua D. Bell

Keyword(s):

Failure Analysis ◽

Non Destructive Testing ◽

Dimensional Metrology ◽

Destructive Testing ◽

X Ray ◽

Advantages And Disadvantages ◽

Computed Laminography ◽

Basic Operating ◽

2D And 3D ◽

Non Destructive

Abstract Modern 2D and 3D X-ray technologies are among the most useful non-destructive testing methods that enable the inspection of an object's internal features without cutting or disassembling the sample. This paper discusses the basic operating principle, advantages, and disadvantages of 2D and 3D X-ray based approaches for testing and failure analysis and describes how these different methods have practical application for failure analysis and dimensional metrology. The techniques discussed are radiography, classical laminography, computed tomography, and computed laminography.

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Dimensional Measurements for Micro- and Nanotechnology

Key Engineering Materials ◽

10.4028/www.scientific.net/kem.381-382.7 ◽

2008 ◽

Vol 381-382 ◽

pp. 7-10

Author(s):

Gao Liang Dai ◽

F. Pohlenz ◽

H.U. Danzebrink ◽

L. Koenders

Keyword(s):

Tungsten Wire ◽

Dimensional Metrology ◽

Atomic Force ◽

Nano Structures ◽

Laser Focus ◽

Dimensional Measurements ◽

Afm Cantilever ◽

Cantilever Probes ◽

Micro Structures ◽

Non Destructive

Metrology plays an important role in the development and commercialisation of micro and nanotechnology. For calibrating versatile micro- and nanoscale standards, a dimensional metrology instrument coupled with multi sensor heads including atomic force microscope (AFM), tactile stylus, laser focus sensor and assembled cantilever probes (ACPs) has been developed. Two kinds of ACPs are highlighted in the paper. One is fabricated by gluing a vertical AFM cantilever to a horizontal AFM cantilever using micro assembling techniques. It is applicable for direct and non-destructive measurements of sidewall surfaces. The other is an ACP ball probe designed for true 3D measurements of micro structures. It is realised by gluing a tungsten wire with a probing sphere ball, 40 ... 120 µm in diameter, to a horizontal AFM cantilever. The ACP ball probe has advantages such as small probing forces (<1µN) and high probing sensitivity. Some typical calibrations on micro and nano structures such as step height, grating and sphere calotte artefact are introduced.

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Luminescence from individual dislocations in II-VI and III-V semiconductors

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100088488 ◽

1991 ◽

Vol 49 ◽

pp. 834-835

Author(s):

J W Steeds

Keyword(s):

Group Iv ◽

Luminescence Properties ◽

Carrier Recombination ◽

Transmission Electron ◽

Wide Range ◽

Basic Physics ◽

Semiconducting Compounds ◽

Diamond Group ◽

Non Destructive ◽

Technological Significance

There is a wide range of experimental results related to dislocations in diamond, group IV, II-VI, III-V semiconducting compounds, but few of these come from isolated, well-characterized individual dislocations. We are here concerned with only those results obtained in a transmission electron microscope so that the dislocations responsible were individually imaged. The luminescence properties of the dislocations were studied by cathodoluminescence performed at low temperatures (~30K) achieved by liquid helium cooling. Both spectra and monochromatic cathodoluminescence images have been obtained, in some cases as a function of temperature.There are two aspects of this work. One is mainly of technological significance. By understanding the luminescence properties of dislocations in epitaxial structures, future non-destructive evaluation will be enhanced. The second aim is to arrive at a good detailed understanding of the basic physics associated with carrier recombination near dislocations as revealed by local luminescence properties.

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Forensic Identifications Aided by Scanning Electron Microscopy of Silicone-Epoxy Microreplicas of Calcified and Cornified Structures

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100117017 ◽

1975 ◽

Vol 33 ◽

pp. 678-679 ◽

Cited By ~ 3

Author(s):

R.F. Sognnaes

Keyword(s):

Electron Microscopy ◽

Scanning Electron Microscopy ◽

Forensic Science ◽

George Washington ◽

Epithelial Surface ◽

Extended Application ◽

Tissue Surfaces ◽

Non Destructive ◽

Scanning Electron ◽

Surface Changes

Sufficient experience has been gained during the past five years to suggest an extended application of microreplication and scanning electron microscopy to problems of forensic science. The author's research was originally initiated with a view to develop a non-destructive method for identification of materials that went into objects of art, notably ivory and ivories. This was followed by a very specific application to the identification and duplication of the kinds of materials from animal teeth and tusks which two centuries ago went into the fabrication of the ivory dentures of George Washington. Subsequently it became apparent that a similar method of microreplication and SEM examination offered promise for a whole series of problems pertinent to art, technology and science. Furthermore, what began primarily as an application to solid substances has turned out to be similarly applicable to soft tissue surfaces such as mucous membranes and skin, even in cases of acute, chronic and precancerous epithelial surface changes, and to post-mortem identification of specific structures pertinent to forensic science.

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