Latest ArF light source with speckle reduction technology for immersion lithography improving chip yield

Author(s):  
Hirotaka Miyamoto ◽  
Takamitsu Komaki ◽  
Toshihiro Ohga ◽  
Taku Yamazaki ◽  
Tsukasa Hori ◽  
...  
2008 ◽  
Author(s):  
Vladimir Fleurov ◽  
Slava Rokitski ◽  
Robert Bergstedt ◽  
Hong Ye ◽  
Kevin O’Brien ◽  
...  

Author(s):  
Walter D. Gillespie ◽  
Toshihiko Ishihara ◽  
William N. Partlo ◽  
George X. Ferguson ◽  
Michael R. Simon

2020 ◽  
Vol 10 (1) ◽  
Author(s):  
Seungjae Lee ◽  
Dongyeon Kim ◽  
Seung-Woo Nam ◽  
Byounghyo Lee ◽  
Jaebum Cho ◽  
...  

Abstract Speckle reduction is an important topic in holographic displays as speckles not only reduce signal-to-noise ratio but also possess an eye-safety issue. Despite thorough exploration of speckle reduction methods using partially coherent light sources, the trade-off involved by the partial coherence has not been thoroughly discussed. Here, we introduce theoretical models that quantify the effects of partial coherence on the resolution and the speckle contrast. The theoretical models allow us to find an optimal light source that maximizes the speckle reduction while minimizing the decline of the other terms. We implement benchtop prototypes of partially coherent holographic displays using the optimal light source, and verify the theoretical models via simulation and experiment. We also present a criterion to evaluate the depth of field in partially coherent holographic displays. We conclude with a discussion about approximations and limitations inherent in the theoretical models.


2007 ◽  
Author(s):  
D.J. W. Brown ◽  
P. O'Keeffe ◽  
V. B. Fleurov ◽  
R. Rokitski ◽  
R. Bergstedt ◽  
...  

Author(s):  
Toshihiko Ishihara ◽  
Robert Rafac ◽  
Wayne J. Dunstan ◽  
Fedor Trintchouk ◽  
Christian Wittak ◽  
...  

2006 ◽  
Author(s):  
Satoshi Tanaka ◽  
Hiroaki Tsushima ◽  
Takanori Nakaike ◽  
Taku Yamazaki ◽  
Takashi Saito ◽  
...  

2007 ◽  
Author(s):  
Toru Suzuki ◽  
Kouji Kakizaki ◽  
Takashi Matsunaga ◽  
Satoshi Tanaka ◽  
Yasufumi Kawasuji ◽  
...  

2009 ◽  
Author(s):  
Slava Rokitski ◽  
Toshi Ishihara ◽  
Rajeskar Rao ◽  
Rui Jiang ◽  
Daniel Riggs ◽  
...  

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