Lateral error reduction in the 3D characterization of deep MOEMS devices using white light interference microscopy
Paul C. Montgomery
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Denis Montaner
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Omar Manzardo
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Hans-Peter Herzig
2010 ◽
Vol 42
(4)
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pp. 1073-1088
V. Nalladega
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S. Sathish
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S. Abburi
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M. F. X. Gigliotti
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P. R. Subramanian
2006 ◽
Vol 14
(15)
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pp. 6788
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Maitreyee Roy
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Colin J. R. Sheppard
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Guy Cox
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Parameswaran Hariharan
Peter de Groot
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Xavier Colonna de Lega
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Jan Liesener
2020 ◽
Vol 8
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pp. 190553-190558
Mengrou Xia
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Rongyao Wu
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Wei Zhan
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Xiaoyuan Ji
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Lianbo Guo
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...
Vishesh Dubey
◽
Azeem Ahmad
◽
Veena Singh
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Ankit Butola
◽
Dalip Singh Mehta
Sébastien MARBACH
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Rémy Claveau
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Fangting WANG
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Jesse SCHIFFLER
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Paul Montgomery
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...
2020 ◽
Vol 28
(10)
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pp. 15101
Mei Sang
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Xiangyu Du
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Shuang Wang
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Tianhua Xu
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Jie Dong
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...
Priyanka Mann
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Veena singh
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Shilpa Tayal
◽
Dalip Singh Mehta
Vishal Srivastava
◽
D. S. Mehta
Arnaud Dubois
◽
Laurent Vabre
◽
Romain Lecaque
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Albert-Claude Boccara