AlGaN/GaN multiple quantum wells grown by atomic-layer deposition

2008 ◽  
Author(s):  
M. H. Lo ◽  
Z. Y. Li ◽  
J. R. Chen ◽  
T. S. Ko ◽  
T. C. Lu ◽  
...  
2020 ◽  
Vol 694 ◽  
pp. 137740 ◽  
Author(s):  
Mostafa Afifi Hassan ◽  
Aadil Waseem ◽  
Muhammad Ali Johar ◽  
Sou Young Yu ◽  
June Key Lee ◽  
...  

2008 ◽  
Vol 93 (13) ◽  
pp. 131116 ◽  
Author(s):  
Zhen-Yu Li ◽  
Ming-Hua Lo ◽  
C. T. Hung ◽  
Shih-Wei Chen ◽  
Tien-Chang Lu ◽  
...  

2008 ◽  
Vol 1068 ◽  
Author(s):  
Ming-Hua Lo ◽  
Zhen-Yu Li ◽  
Shih-Wei Chen ◽  
Jhih-Cang Hong ◽  
Ting-Chang Lu ◽  
...  

ABSTRACTIn this work, we report on the growth of ultraviolet (UV) AlGaN/GaN multiple quantum wells (MQWs) structure using atomic layer deposition (ALD) technique. The AlGaN/GaN MQW sample grown on the sapphire substrate consisted of three GaN QWs and four AlGaN barriers comprised AlN/GaN superlattices (SLs). The root-mean-square value of the surface morphology was only 0.35 nm observed from the atomic force microscope image and no crack was found on the surface. Both of the high resolution X-ray diffraction curves and transmission electron microscope images showed sharp interfaces between SLs layers and QWs with good periodicity. These results demonstrate that the ALD could be a very useful technique for controlling the crystalline quality and thickness of the III-nitride epilayer.


2010 ◽  
Vol 21 (48) ◽  
pp. 485402 ◽  
Author(s):  
Wonyoung Lee ◽  
Neil P Dasgupta ◽  
Hee Joon Jung ◽  
Jung-Rok Lee ◽  
Robert Sinclair ◽  
...  

1992 ◽  
Vol 31 (Part 2, No. 11B) ◽  
pp. L1583-L1585 ◽  
Author(s):  
Zhongling Peng ◽  
Jie Li ◽  
Wenhua Yao ◽  
Li He ◽  
Xingyu Cheng ◽  
...  

2002 ◽  
Vol 12 (02) ◽  
pp. 401-419
Author(s):  
ASIF KHAN ◽  
J. W. YANG ◽  
G. SIMIN ◽  
R. GASKA ◽  
M. S. SHUR

Our new Strain and Energy Band Engineering approach allows us to control, modulate or eliminate the strain thereby significantly enhancing the performance of electronic and optoelectronic devices on SiC and sapphire substrates using a new-pulsed atomic layer epitaxy procedure. New types of high power high temperature transistors with improved performance were fabricated XRD, PL and AFM spectra are used to establish a high structural and optical quality of die quaternary multiple quantum wells. We have also demonstrated the use of PALE deposited quaternary AlInGaN multiple quantum wells in the active region of a UV LED with emission ranging from 305 nm to 304 nm.


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