Comparative study of cathode and magnetron sputtering methods for depositing Pb(TiZr)O3 ferroelectric film

2010 ◽  
Vol 4 (5) ◽  
pp. 758-760 ◽  
Author(s):  
V. G. Beshenkov ◽  
A. G. Znamenskii ◽  
V. A. Marchenko
Keyword(s):  
Magnetron Sputtering ◽  
Comparative Study ◽  
Ferroelectric Film

scholarly journals A comparative study of copper thin films deposited using magnetron sputtering and supercritical fluid deposition techniques

2017 ◽  
Vol 643 ◽  
pp. 53-59 ◽  
Author(s):  
B. Giroire ◽  
M. Ali Ahmad ◽  
G. Aubert ◽  
L. Teule-Gay ◽  
D. Michau ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Comparative Study ◽  
Supercritical Fluid ◽  
Deposition Techniques

scholarly journals Comparative Study of ZnO Thin Films Grown on Quartz Glass and Sapphire (001) Substrates by Means of Magnetron Sputtering and High-Temperature Annealing

2019 ◽  
Vol 9 (21) ◽  
pp. 4509
Author(s):  
Weijia Yang ◽  
Fengming Wang ◽  
Zeyi Guan ◽  
Pengyu He ◽  
Zhihao Liu ◽  
...  
Keyword(s):  
Thin Films ◽  
High Temperature ◽  
Magnetron Sputtering ◽  
Comparative Study ◽  
Quartz Glass ◽  
Photoelectron Spectroscopy ◽  
Zno Thin Films ◽  
High Temperature Annealing ◽  
X Ray ◽  
Glass Substrates

In this work, we reported a comparative study of ZnO thin films grown on quartz glass and sapphire (001) substrates through magnetron sputtering and high-temperature annealing. Firstly, the ZnO thin films were deposited on the quartz glass and sapphire (001) substrates in the same conditions by magnetron sputtering. Afterwards, the sputtered ZnO thin films underwent an annealing process at 600 °C for 1 h in an air atmosphere to improve the quality of the films. X-ray diffraction, scanning electron microscopy, atomic force microscopy, X-ray photoelectron spectroscopy (XPS), ultraviolet-visible spectra, photoluminescence spectra, and Raman spectra were used to investigate the structural, morphological, electrical, and optical properties of the both as-received ZnO thin films. The ZnO thin films grown on the quartz glass substrates possess a full width of half maximum value of 0.271° for the (002) plane, a surface root mean square value of 0.50 nm and O vacancies/defects of 4.40% in the total XPS O 1s peak. The comparative investigation reveals that the whole properties of the ZnO thin films grown on the quartz glass substrates are comparable to those grown on the sapphire (001) substrates. Consequently, ZnO thin films with high quality grown on the quartz glass substrates can be achieved by means of magnetron sputtering and high-temperature annealing at 600 °C.

Comparative study of Ti-C-Ni-Al, Ti-C-Ni-Fe, and Ti-C-Ni-Al/Ti-C-Ni-Fe coatings produced by magnetron sputtering, electro-spark deposition, and a combined two-step process

2018 ◽  
Vol 44 (7) ◽  
pp. 7637-7646 ◽  
Author(s):  
Ph.V. Kiryukhantsev-Korneev ◽  
A.N. Sheveyko ◽  
N.V. Shvindina ◽  
E.A. Levashov ◽  
D.V. Shtansky
Keyword(s):  
Magnetron Sputtering ◽  
Comparative Study ◽  
Step Process

A comparative study on the properties of chromium coatings deposited by magnetron sputtering with hot and cooled target

Vacuum ◽  
2017 ◽  
Vol 143 ◽  
pp. 479-485 ◽  
Author(s):  
D.V. Sidelev ◽  
G.A. Bleykher ◽  
M. Bestetti ◽  
V.P. Krivobokov ◽  
A. Vicenzo ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Comparative Study

A comparative study of thin coatings of Au/Pd, Pt and Cr produced by magnetron sputtering for FE‐SEM

1998 ◽  
Vol 189 (1) ◽  
pp. 79-89 ◽  
Author(s):  
Stokroos ◽  
Kalicharan ◽  
Van Der Want ◽  
Jongebloed
Keyword(s):  
Magnetron Sputtering ◽  
Comparative Study ◽  
Thin Coatings
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