scholarly journals A comparative study of copper thin films deposited using magnetron sputtering and supercritical fluid deposition techniques

2017 ◽  
Vol 643 ◽  
pp. 53-59 ◽  
Author(s):  
B. Giroire ◽  
M. Ali Ahmad ◽  
G. Aubert ◽  
L. Teule-Gay ◽  
D. Michau ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Comparative Study ◽  
Supercritical Fluid ◽  
Deposition Techniques

scholarly journals Comparative Study of ZnO Thin Films Grown on Quartz Glass and Sapphire (001) Substrates by Means of Magnetron Sputtering and High-Temperature Annealing

2019 ◽  
Vol 9 (21) ◽  
pp. 4509
Author(s):  
Weijia Yang ◽  
Fengming Wang ◽  
Zeyi Guan ◽  
Pengyu He ◽  
Zhihao Liu ◽  
...  
Keyword(s):  
Thin Films ◽  
High Temperature ◽  
Magnetron Sputtering ◽  
Comparative Study ◽  
Quartz Glass ◽  
Photoelectron Spectroscopy ◽  
Zno Thin Films ◽  
High Temperature Annealing ◽  
X Ray ◽  
Glass Substrates

In this work, we reported a comparative study of ZnO thin films grown on quartz glass and sapphire (001) substrates through magnetron sputtering and high-temperature annealing. Firstly, the ZnO thin films were deposited on the quartz glass and sapphire (001) substrates in the same conditions by magnetron sputtering. Afterwards, the sputtered ZnO thin films underwent an annealing process at 600 °C for 1 h in an air atmosphere to improve the quality of the films. X-ray diffraction, scanning electron microscopy, atomic force microscopy, X-ray photoelectron spectroscopy (XPS), ultraviolet-visible spectra, photoluminescence spectra, and Raman spectra were used to investigate the structural, morphological, electrical, and optical properties of the both as-received ZnO thin films. The ZnO thin films grown on the quartz glass substrates possess a full width of half maximum value of 0.271° for the (002) plane, a surface root mean square value of 0.50 nm and O vacancies/defects of 4.40% in the total XPS O 1s peak. The comparative investigation reveals that the whole properties of the ZnO thin films grown on the quartz glass substrates are comparable to those grown on the sapphire (001) substrates. Consequently, ZnO thin films with high quality grown on the quartz glass substrates can be achieved by means of magnetron sputtering and high-temperature annealing at 600 °C.

scholarly journals DLC/TI THIN FILMS PROPERTIES PREPARED BY HYBRID LASER TECHNOLOGIES

2017 ◽  
Vol 8 ◽  
pp. 11-13
Author(s):  
Jan Mikšovský ◽  
Miroslav Jelínek ◽  
Petr Písařík ◽  
Tomáš Kocourek ◽  
Jan Remsa ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Pulse Laser Deposition ◽  
Pulse Laser ◽  
Laser Deposition ◽  
Diamond Like Carbon ◽  
Laser Technologies ◽  
Different Types ◽  
Deposition Techniques

Layers of diamond-like carbon are usable in many fields of industry as well as in medicine. Many scientific groups have worked with different types of deposition techniques to prepare DLC layers with improved or unique properties. The DLC properties could be improved by various dopations. In this study, we focused on DLC layers doped by titanium, prepared by hybrid laser depositions. Two techniques were used: Dual pulse laser deposition (DualPLD) and pulse laser deposition in combination with magnetron sputtering (PLD/MS). Preliminary tests for morphology, wettability, adhesion, hardness, corrosion, friction and wearability were examined.

MICROSTRUCTURES OF SPUTTERED ORIENTED Si/CeO2 BILAYERs YBa2Cu3O7-δ/Si INTEGRATED MICROELECTRONICS

2003 ◽  
Vol 17 (04n06) ◽  
pp. 848-854 ◽  
Author(s):  
A. CHIODONI ◽  
E. MEZZETTI ◽  
D. BOTTA ◽  
L. GOZZELINO ◽  
B. MINETTI ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Cerium Dioxide ◽  
Buffer Layers ◽  
X Ray Diffraction ◽  
Sputtering Deposition ◽  
X Ray ◽  
Integrated Electronics ◽  
Lattice Matching ◽  
Deposition Techniques

In the framework of a research aimed to superconductor/semiconductor integrated electronics, we have grown a-axis oriented YBa 2 Cu 3 O 7-δ (YBCO) thin films on silicon (100) substrates with (111) oriented insulating buffer layers of cerium dioxide ( CeO 2), using magnetron sputtering deposition techniques. The properties of the cerium dioxide layer have been preliminary optimized by means of several layout and by monitoring the growing procedures through X-ray diffraction, AFM and TEM techniques. The lattice matching between CeO 2 and YBCO resulted to be worsened by an amorphous thin SiO 2 layer at the Si/CeO 2 interface, that decouples the buffer orientation from the seed orientation. However, it was possible to grow a relatively thick, optimally textured layer of CeO 2 without spurious orientations. The YBCO films deposited on top of this layer result preferentially a-axis oriented. The transition widths are very large, jet well controllable and reproducible. Some technological applications can be already envisaged.

Comparative study of annealing and oxidation effects in a-SiC:H and a-SiC thin films deposited by radio-frequency magnetron sputtering

2011 ◽  
Vol 519 (7) ◽  
pp. 2218-2224 ◽  
Author(s):  
A.V. Vasin ◽  
Sh. Muto ◽  
Yu. Ishikawa ◽  
A.V. Rusavsky ◽  
T. Kimura ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Comparative Study ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering

Comparative study of the morphological degradation in nickel thin films exposed to H2S media and deposited by magnetron sputtering and electrolytic process

2010 ◽  
Vol 46 (2) ◽  
pp. 115-119 ◽  
Author(s):  
C. Magaña-Zavala ◽  
M. E. Angeles-San Martin ◽  
F. J. Rodríguez-Gómez ◽  
D. R. Acosta ◽  
R. Avila-Godoy ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Comparative Study ◽  
Nickel Thin Films ◽  
Electrolytic Process
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