Non-aqueous electrochemical deposition of lead zirconate titanate films for flexible sensor applications

2017 ◽  
Vol 31 (31) ◽  
pp. 1750287
Author(s):  
Sherin Joseph ◽  
A. V. Ramesh Kumar ◽  
Reji John

Lead zirconate titanate (PZT) is one of the most important piezoelectric materials widely used for underwater sensors. However, PZTs are hard and non-compliant and hence there is an overwhelming attention devoted toward making it flexible by preparing films on flexible substrates by different routes. In this work, the electrochemical deposition of composition controlled PZT films over flexible stainless steel (SS) foil substrates using non-aqueous electrolyte dimethyl sulphoxide (DMSO) was carried out. Effects of various key parameters involved in electrochemical deposition process such as current density and time of deposition were studied. It was found that a current density of 25 mA/cm2 for 5 min gave a good film. The morphology and topography evaluation of the films was carried out by scanning electron microscopy (SEM) and atomic force microscopy (AFM), respectively, which showed a uniform morphology with a surface roughness of 2 nm. The PZT phase formation was studied using X-ray diffraction (XRD) and corroborated with Raman spectroscopic studies. The dielectric constant, dielectric loss, hysteresis and I–V characteristics of the film was evaluated.

1988 ◽  
Vol 23 (7) ◽  
pp. 2631-2636 ◽  
Author(s):  
N. R. Rajopadhye ◽  
S. V. Bhoraskar ◽  
S. Badrinarayan ◽  
A. P. B. Sinha

1990 ◽  
Vol 200 ◽  
Author(s):  
C. Sudhama ◽  
J. C. Carrano ◽  
L. H. Parker ◽  
V. Chikarmane ◽  
J. C. Lee ◽  
...  

ABSTRACTThis paper investigates the issues in the scaling of thin film PZT (Lead-Zirconate-Titanate) capacitors for DRAM (Dynamic Random Access Memories) applications. The test structures used were MIM (metal-insulator-metal) capacitors with platinum electrodes and PZT deposited using a sol-gel process. Charge storage density (Q'c), leakage current density (JL), unipolar switching time to 10% decay (ts), time dependent dielectric breakdown (TDDB) and electrical fatigue have been analyzed. Unipolar switching time has been modeled as an RC time constant, where C is electric-field dependent. Q'c at a given electric field appears to remain constant over the range of film thicknesses and electrode areas studied. Leakage current density and time-to-breakdown (tBD) for a given electric field degrade with decreasing film thickness. Unipolar stressing causes considerably less fatigue than bipolar stressing, and after 2 × 1011 cycles, a 400nm film still exhibits sufficient Q'c for DRAM operation.


2009 ◽  
Vol 404 (20) ◽  
pp. 3709-3716 ◽  
Author(s):  
Rajiv Ranjan ◽  
Rajiv Kumar ◽  
Banarji Behera ◽  
R.N.P. Choudhary

2012 ◽  
Vol 535-537 ◽  
pp. 1507-1511 ◽  
Author(s):  
De Yi Zheng ◽  
Jonathan Swingler ◽  
Paul M. Weaver

Piezoelectric materials because their special ability to convert bwteen kinetic energy and electrical energy. Therefore, they are widely applicated in the areas such as sensors, resonators etc. However, the electrical degradation phenomenon of piezoelectric materials will cause the degradation of their performance. The electrode materails has been reported can severely influence the electrical degradation of piezoelectric materials. In this paper, the life time of the lead zirconate titanate capacitors with nickel, gold or silver electrodes are investigated. It is suggested that, the poor migration ability of the electrode elements gives the PZT capacitors a longer lifetime. The reason of no observation of the electrode materials in the capacitor material is also discussed.


2020 ◽  
Vol 31 (7) ◽  
pp. 956-966 ◽  
Author(s):  
Xiaoyu Guan ◽  
Hairong Chen ◽  
Hong Xia ◽  
Yaqin Fu ◽  
Yiping Qiu ◽  
...  

Although many kinds of flexible piezoelectric materials have been developed, there were few reports on flexible multifunctional nanofibers for energy harvesting. In this study, we prepared multifunctional nanofibers from lead zirconate titanate particles and shape memory polyurethane by electrospinning. The resulting nanofibers had both piezoelectric and shape memory effects. To improve the dispersion, lead zirconate titanate particles were modified by silane coupling agents. The lead zirconate titanate/shape memory polyurethane nanofibers were used to harvest energy from sinusoidal vibrations, and the lead zirconate titanate 80 wt% sample produced voltages of 120.3 mV (peak-to-peak). Taking advantage of the shape memory effect, the lead zirconate titanate/shape memory polyurethane nanofibers can be easily deformed into desired shapes and revealed the potential for realizing energy harvesting in complex structures.


1989 ◽  
Vol 157 ◽  
Author(s):  
Peter K. Schenck ◽  
Lawrence P. Cook ◽  
Jianrong Zhao ◽  
John W. Hastie ◽  
Edward N. Farabaugh ◽  
...  

ABSTRACTLaser-induced vaporization of ceramics shows promise as a technique for the deposition of thin films of these materials. Critical to the utility of this technique is an understanding of the laser-material interaction, plume formation and dynamics, material transport and how variations in the vaporization conditions affect the deposited film. Lead zirconate titanate (PZT, Zr/Ti-47/53) targets were irradiated using a q-switched Nd:YAG laser (15 ns, 100 mJ at 1.064 /μm) . The deposition chamber was maintained at a pressure of 100 mTorr oxygen. Material from the plume was collected on silicon wafer substrates, suspended 1.0 - 3.0 cm above the target. The films were characterized by SEM/EDX, TEM, x-ray diffraction and electrical measurements before and after annealing. Very thin films were deposited on carbon coated metal grids for observation in the TEM using a hot stage to study crystallization. Temporally and spatially resolved spectra of the light emitted by the laser-generated plume were obtained with an optical multichannel analyzer (0MA) to yield information on the plume generation and chemistry of the deposition process. These spectra indicate that under these conditions a plasma is created above the target surface which persists for -100 ns after the laser pulse.


Sign in / Sign up

Export Citation Format

Share Document