The effect of post-annealing under CdCl2 atmosphere on the properties of ITO thin films deposited by DC magnetron sputtering

2009 ◽  
Vol 21 (5) ◽  
pp. 441-444 ◽  
Author(s):  
Shenghao Wang ◽  
Jingquan Zhang ◽  
Bo Wang ◽  
Lianghuan Feng ◽  
Yaping Cai ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Dc Magnetron Sputtering ◽  
Post Annealing ◽  
Ito Thin Films

PREPARATION OF SUPERCONDUCTING Bi–Pb–Sr–Ca–Cu–O FILMS BY DC MAGNETRON SPUTTERING METHOD

1990 ◽  
Vol 04 (13) ◽  
pp. 847-853
Author(s):  
Y.H. WANG ◽  
Y.Z. ZHANG ◽  
Y.Y. ZHAO ◽  
X.G. QIU ◽  
P. XU ◽  
...  
Keyword(s):  
Thin Films ◽  
Critical Current Density ◽  
Magnetron Sputtering ◽  
Current Density ◽  
High Current Density ◽  
High Current ◽  
Dc Magnetron Sputtering ◽  
Sharp Transition ◽  
Interesting Phenomenon ◽  
Post Annealing

Superconducting Bi–Pb–Sr–Ca–Cu–O thin films of zero resistivity temperature 108 K and critical current density of 1000 A/cm2 (at 77 K) were deposited on MgO(100) single-crystal substrates by DC magnetron sputtering. After depositing at 350–400°C and post annealing at 837.5°C for 1–5 hours in air, with different cooling rate we got highly c-axis oriented thin films which show zero resistivity at 103 K, 108 K. The results we got show an interesting phenomenon: the mixture of high and low Tc phase exhibit a low onset, sharp transition and high current density.

Effect of Annealing Temperature on Platinum/YSZ Thin Film Fabricated Using RF and DC Magnetron Sputtering

2017 ◽  
Vol 268 ◽  
pp. 229-233
Author(s):  
A.R. Nurhamizah ◽  
Zuhairi Ibrahim ◽  
Rosnita Muhammad ◽  
Yussof Wahab ◽  
Samsudi Sakrani
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Magnetron Sputtering ◽  
Annealing Temperature ◽  
X Ray Diffraction ◽  
Dc Magnetron Sputtering ◽  
X Ray ◽  
Post Annealing ◽  
Two Temperatures ◽  
Platinum Thin Film

This research aims to study the growth and the effect of annealing temperature on the structural properties of Platinum/YSZ/Platinum thin film. The thin films were prepared by RF and DC magnetron sputtering method utilized platinum as electrodes (anode and cathode) and YSZ as electrolyte. Two temperatures of annealing (400 and 600 °C) were conducted onto Platinum/YSZ/Platinum thin film for comparison in this study. Crystalline phase, microstructure and thickness of thin films were evaluated using X-Ray Diffraction (XRD) and Field Emission Scanning Electron Microscope (FE-SEM) technique. Results show that Pt/YSZ/Pt thin film without post-annealing gives a better morphology and crystal phase.

SPUTTERING DEPOSITION OF Tl–Ca–Ba–Cu–O THIN FILMS WITH ZERO RESISTANCE AT 101 K

1989 ◽  
Vol 03 (13) ◽  
pp. 1013-1016 ◽  
Author(s):  
S. L. YAN ◽  
X. J. HU ◽  
Q. X. SONG ◽  
H. L. CAO ◽  
J. YAN ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Surface Structure ◽  
Single Phase ◽  
Xrd Analysis ◽  
Dc Magnetron Sputtering ◽  
Ceramic Substrates ◽  
Sputtering Deposition ◽  
Post Annealing ◽  
Zero Resistance

Superconducting Tl–Ca–Ba–Cu–O thin films have been prepared by dc magnetron sputtering from a pair of Tl 2 Ca 1 Ba 3 Cu 4 O y bulk targets. The post-annealing films on ZrO 2 ceramic substrates exhibit an onset temperature of about 125 K and zero resistance as high as 101 K. SEM showed a smooth terraced surface structure. The XRD analysis proved that the films were polycrystalline and were not single phase superconducting material.

Effect of Coating Thickness (25–100 nm) on Properties of TiO2 Thin Films Prepared by DC Magnetron Sputtering with a TiO2 Target and Post-Annealing Process

2018 ◽  
Vol 24 (11) ◽  
pp. 8930-8934
Author(s):  
Noormariah Muslim ◽  
Muhammad Nur Syafi’ie Md Idris ◽  
Ying Woan Soon ◽  
Chee Ming Lim ◽  
Nyuk Yoong Voo
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Coating Thickness ◽  
Annealing Process ◽  
Dc Magnetron Sputtering ◽  
Tio2 Thin Films ◽  
Post Annealing

Optimization in Synthesis of ITO Thin Films Fabricated by DC Magnetron Sputtering Method

2014 ◽  
Vol 575 ◽  
pp. 254-263 ◽  
Author(s):  
Hua Jing Zheng ◽  
Chi Zhang ◽  
Zheng Ruan
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Electrical Conductivity ◽  
Magnetron Sputtering ◽  
Water Pressure ◽  
Dc Magnetron Sputtering ◽  
Sputtering Power ◽  
Conductive Substrate ◽  
Ito Thin Films ◽  
Sputtering Pressure

With high optical transparency and electrical conductivity, ITO thin films were fabricated by DC magnetron sputtering. Series of research and exploration are presented on DC magnetron sputtering method for preparing ITO thin film. With substrate temperature of 60 °C, sputtering power of 200W,sputtering pressure of 1 mTorr, water pressure of 2×10-5Torr, the sheet resistance of the ITO conductive substrate is 53 Ω/□ and the transmittance is 83%.

A Study of ITO Thin Films Fabricated by DC Magnetron Sputtering Method

2013 ◽  
Vol 834-836 ◽  
pp. 79-89
Author(s):  
Xian Ming Yang ◽  
Lin Liu ◽  
Juan Xiu Lin
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
X Ray Diffraction ◽  
Dc Magnetron Sputtering ◽  
Pressure Work ◽  
Atomic Force ◽  
Work Pressure ◽  
Sputtering Power ◽  
Ito Thin Films ◽  
Test Table

With high optical transparency and electrical conductivity, ITO thin films were fabricated by DC magnetron sputtering. Based on orthogonal test table L18 (35), the effects of process parameters included water partial pressure, work pressure, substrate temperature, oxygen flow rate and sputtering power, on the optoelectronics properties of ITO thin films were investigated in detail(systematically). Calibration of sheet resistance transmittance, atomic force microscope, and X-ray diffraction were employed to characterize the ITO films.

scholarly journals ITO thin films prepared by DC magnetron sputtering method using ITO target. Preparation of ITO films on low temperature glass substrate.

Shinku ◽  
1989 ◽  
Vol 32 (3) ◽  
pp. 336-340
Author(s):  
Yoshiyuki TSUDA ◽  
Hideaki YASUI ◽  
Hidenobu SINTAKU ◽  
Hiroyoshi TANAKA ◽  
Masahide YOKOYAMA
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Magnetron Sputtering ◽  
Glass Substrate ◽  
Dc Magnetron Sputtering ◽  
Target Preparation ◽  
Ito Thin Films ◽  
Ito Films
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