DEVELOPMENT OF PREPARATION OF THE FUNCTIONAL THIN FILMS BY PULSED LASER DEPOSITION

2005 ◽  
Vol 12 (04) ◽  
pp. 597-604 ◽  
Author(s):  
YAFAN ZHAO ◽  
CHUANZHONG CHEN ◽  
LUBIN CHEN ◽  
QUANHE BAO

Pulsed laser deposition (PLD) exhibits unique advantages for the preparation of functional thin films which are widely used in microelectronics, photoelectrons, integrate circuits, superconductors and biomedical fields. The principle of and the characteristics of PLD are introduced, its applications in ferroelectrics, high-temperature superconductors, diamond-like and superlattices. The future application trend is reviewed.

1992 ◽  
Vol 268 ◽  
Author(s):  
D.B. Fenner ◽  
O. Li ◽  
P.W. Morrison ◽  
J. Cosgrove ◽  
L. Lynds ◽  
...  

ABSTRACTThe successful methods for laser ablation and deposition of epitaxial thin films of metal oxides, especially the high-temperature superconductors (HTSC), have been adapted to pulsed laser deposition (PLD) of the narrow-band compound semiconductor HgCdTe, and the wide-band semiconductor β-SiC. Useful film quality is readily obtained in both cases: the HgCdTe films on CdTe wafers function in IR photodetection and the 3-SiC is epitaxial on both Si (100) and (111) wafers.


2009 ◽  
Author(s):  
G. Balakrishnan ◽  
S. Murugesan ◽  
C. Ghosh ◽  
P. Kuppusami ◽  
R. Divakar ◽  
...  

2011 ◽  
Vol 47 (4) ◽  
pp. 415-422 ◽  
Author(s):  
G. Balakrishnan ◽  
P. Kuppusami ◽  
S. Murugesan ◽  
E. Mohandas ◽  
D. Sastikumar

2005 ◽  
Vol 12 (03) ◽  
pp. 401-408 ◽  
Author(s):  
YAFAN ZHAO ◽  
CHUANZHONG CHEN ◽  
DIANGANG WANG

Pulsed laser deposition (PLD) is a relatively new technique for producing thin films. It presents unique advantages for the deposition of bioactive ceramics. The mechanism and characteristics of the technique PLD are introduced. Its applications and current research status in hydroxyapatite and bioglass thin films are reviewed. The effect of processing parameters of PLD, including atmosphere, substrate temperature, laser wavelength and target properties, on the structures and the properties of the hydroxyapatite film, is analyzed in detail. Future application trends are also analyzed.


2013 ◽  
Vol 62 (23) ◽  
pp. 237701
Author(s):  
Wang Wei ◽  
Tang Jia-Wei ◽  
Wang Le-Tian ◽  
Chen Xiao-Bing

1996 ◽  
Vol 96-98 ◽  
pp. 672-678 ◽  
Author(s):  
David P. Norton ◽  
B.C. Chakoumakos ◽  
D.H. Lowndes ◽  
J.D. Budai

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