Mechanical Instability of Wedge-Shaped Cr Films Quenched by Silicone Oil during Deposition

By using the mobile property of silicone oil during deposition, characteristic wedge-shaped chromium (Cr) films have been successfully prepared on glass substrates by direct current magnetron sputtering, and their mechanical instability is investigated. The experiment shows that a disordered network composed of straight-sided buckles, which is due to relief of large compressive stress after deposition, can be widely observed in these films. The size of the buckles increases linearly with the film thickness. In the vicinity of spreading front of the silicone oil, parallel straight-sided buckles perpendicular to the front and bifurcation morphologies can be observed. The influence of the edge effect on the buckle morphologies is also discussed in this paper.

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THICKNESS DEPENDENCE OF BUCKLING PATTERNS OF Ta FILMS SPUTTERED ON GLASS SUBSTRATES

Surface Review and Letters ◽

10.1142/s0218625x12500229 ◽

2012 ◽

Vol 19 (03) ◽

pp. 1250022 ◽

Cited By ~ 5

Author(s):

YONG-JU ZHANG ◽

SEN-JIANG YU ◽

HONG ZHOU ◽

MIAO-GEN CHEN ◽

ZHI-WEI JIAO

Keyword(s):

Mechanical Properties ◽

Magnetron Sputtering ◽

Film Thickness ◽

Compressive Stress ◽

Direct Current ◽

Thickness Dependence ◽

Elastic Theory ◽

Geometrical Parameters ◽

Glass Substrates ◽

Direct Current Magnetron Sputtering

Tantalum (Ta) films deposited on glass substrates have been prepared by a direct current magnetron sputtering method, and buckling patterns induced by residual compressive stress are investigated in detail. When the film thickness increases, the buckling morphologies evolve from straight-sided buckle network to wavy or wormlike wrinkles gradually, and finally change into telephone cord buckles. The geometrical parameters of the buckling patterns are found to increase linearly with the film thickness. Based on the geometrical parameters of the buckling patterns, the mechanical properties of the Ta films are also discussed in the frame of continuum elastic theory.

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THE INFLUENCE OF EXTERNAL DISTURBANCE ON BUCKLING PATTERNS IN WEDGE-SHAPED Fe FILMS

Surface Review and Letters ◽

10.1142/s0218625x13500297 ◽

2013 ◽

Vol 20 (03n04) ◽

pp. 1350029 ◽

Cited By ~ 1

Author(s):

HONG ZHOU ◽

SEN-JIANG YU ◽

YONG-JU ZHANG ◽

MIAO-GEN CHEN

Keyword(s):

Magnetron Sputtering ◽

Growth Process ◽

Silicone Oil ◽

External Disturbance ◽

Morphological Characteristics ◽

Film System ◽

Glass Substrates ◽

Spontaneous Formation ◽

Stress Energy ◽

Direct Current Magnetron Sputtering

A wedge-shaped iron (Fe) film system, quenched by silicone oil during deposition, has been prepared on glass substrates by direct current magnetron sputtering, and the influence of external disturbance on buckling patterns is investigated. The experiment shows that the wedge-shaped Fe film possesses a high compressive stress, which is relieved by spontaneous formation of telephone cord buckles in the atmosphere condition. The growth process can last several days to more than a month. When the film is disturbed by an external force, the stored stress energy will release drastically to form straight-sided buckles within several seconds. The morphological characteristics, edge effect and formation mechanism of the straight-sided buckles are discussed in detail.

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