THE EFFECT OF TEMPERATURE ON SYNTHESIS AND CHARACTERIZATION OF BMN–BASE PIEZOELECTRIC THIN FILM PREPARED BY SPRAY PYROLYSIS

The 0.65Ba(Mg1/3,Nb2/3)O3-0.35BaTiO3 thin films was deposited on glass/aluminum substrates by using spray pyrolysis method. The effect of annealing temperature on perovskite phase and crystalline structure analysis of the BMN-BT films was performed on an X-ray diffraction (XRD). Surface morphology, roughness and particle size of the BMN-BT thin films was characterized with atomic force microscopy (AFM) and scanning electronic microscopy (SEM). Polarization hysteresis measurements was performed at different temperatures. From the P–E hysteresis loops one can observe the best temperature that led to improved properties of dielectric constant, polarization and piezoelectric coefficients were 600°C.