Dependence of Gate Oxide Breakdown Frequency on Ion Current Density Distributions during Electron Cyclotron Resonance Plasma Etching
1991 ◽
Vol 30
(Part 2, No. 11A)
◽
pp. L1902-L1904
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1991 ◽
Vol 9
(1)
◽
pp. 85-90
◽
1991 ◽
Vol 30
(Part 1, No. 2)
◽
pp. 423-427
◽
1998 ◽
Vol 16
(5)
◽
pp. 2720