The Characteristics of Nitrogen Implanted Tungsten Film as a New Diffusion Barrier for Metal Organic Chemical Vapor Deposited Cu Metallization
1995 ◽
Vol 34
(Part 1, No. 12B)
◽
pp. 6857-6860
◽
Keyword(s):
2005 ◽
Keyword(s):
1998 ◽
Vol 37
(Part 2, No. 4A)
◽
pp. L406-L408
◽
1999 ◽
Vol 17
(3)
◽
pp. 1101
◽
2003 ◽
Vol 163-164
◽
pp. 214-219
◽
Keyword(s):
2007 ◽
Vol 46
(No. 47)
◽
pp. L1173-L1175
◽
Keyword(s):
2005 ◽
Vol 495-497
◽
pp. 1371-1376
Keyword(s):
2001 ◽
Vol 40
(Part 1, No. 1)
◽
pp. 265-268
◽
2008 ◽
Vol 3
(3)
◽
pp. 261-264
◽