Improvement on Fluorine Effect under High Field Stress in Tungsten-Polycide Gated Metal-Oxide-Semiconductor Field-Effect Transistor with Oxynitride and/or Reoxidized-Oxynitride Gate Dielectric
1996 ◽
Vol 35
(Part 1, No. 5A)
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pp. 2590-2594
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Keyword(s):
2008 ◽
Vol 29
(9)
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pp. 977-980
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2011 ◽
Vol 29
(3)
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pp. 03C122
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2004 ◽
Vol 43
(1)
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pp. 77-81
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2010 ◽
Vol 49
(12)
◽
pp. 124202
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1994 ◽
Vol 41
(10)
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pp. 1819-1823
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Keyword(s):