Improvement on Fluorine Effect under High Field Stress in Tungsten-Polycide Gated Metal-Oxide-Semiconductor Field-Effect Transistor with Oxynitride and/or Reoxidized-Oxynitride Gate Dielectric

1996 ◽  
Vol 35 (Part 1, No. 5A) ◽  
pp. 2590-2594 ◽  
Author(s):  
Chii-Wen Chen ◽  
Yean-Kuen Fang ◽  
Kan-Yuan Lee ◽  
Jang-Cheng Hsieh ◽  
Mong-Song Liang
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