Inversion-Mode Self-Aligned $\hbox{In}_{0.53}\hbox{Ga}_{0.47}\hbox{As}$ N-Channel Metal-Oxide-Semiconductor Field-Effect Transistor With HfAlO Gate Dielectric and TaN Metal Gate

2008 ◽  
Vol 29 (9) ◽  
pp. 977-980 ◽  
Author(s):  
J. Q. Lin ◽  
S. J. Lee ◽  
H. J. Oh ◽  
G. Q. Lo ◽  
D. L. Kwong ◽  
...  
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