Inversion-Mode Self-Aligned $\hbox{In}_{0.53}\hbox{Ga}_{0.47}\hbox{As}$ N-Channel Metal-Oxide-Semiconductor Field-Effect Transistor With HfAlO Gate Dielectric and TaN Metal Gate
2008 ◽
Vol 29
(9)
◽
pp. 977-980
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1999 ◽
Vol 38
(Part 2, No. 6A/B)
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pp. L629-L631
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Keyword(s):
2011 ◽
Vol 29
(3)
◽
pp. 03C122
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2010 ◽
Vol 49
(12)
◽
pp. 124202
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1999 ◽
Vol 38
(Part 1, No. 11)
◽
pp. 6226-6231
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