Effects of Helicon-Wave-Plasma Etching on the Charging Damage of Aluminum Interconnects

1998 ◽  
Vol 37 (Part 1, No. 7A) ◽  
pp. 3867-3870
Author(s):  
Wendy Lin ◽  
Tzong-Kuei Kang ◽  
Yean-Chyi Perng ◽  
Bau-Tong Dai ◽  
Huang-Chung Cheng
Keyword(s):  
Plasma Etching ◽  
Helicon Wave ◽  
Aluminum Interconnects ◽  
Helicon Wave Plasma

Physical damage in silicon formed by helicon wave plasma etching

1993 ◽  
Vol 74 (9) ◽  
pp. 5402-5405 ◽  
Author(s):  
Tsutomu Tsukada ◽  
Hiroshi Nogami ◽  
Jun Hayashi ◽  
Kazu Kawaguchi ◽  
Tohru Hara
Keyword(s):  
Plasma Etching ◽  
Physical Damage ◽  
Helicon Wave ◽  
Helicon Wave Plasma

Damage Formed on Silicon Surface by Helicon Wave Plasma Etching

1993 ◽  
Vol 32 (Part 2, No. 4A) ◽  
pp. L536-L538 ◽  
Author(s):  
Tohru Hara ◽  
Kazu Kawaguchi ◽  
Jun Hayashi ◽  
Hiroshi Nogami ◽  
Tsutomu Tsukada
Keyword(s):  
Plasma Etching ◽  
Silicon Surface ◽  
Helicon Wave ◽  
Helicon Wave Plasma

Etching characteristics in helicon wave plasma

1993 ◽  
Vol 2 (1) ◽  
pp. 11-13 ◽  
Author(s):  
H Kitagawa ◽  
A Tsunoda ◽  
H Shindo ◽  
Y Horiike
Keyword(s):  
Helicon Wave ◽  
Helicon Wave Plasma

Low Energy Bias Sputtering Filling of SiO2 into High Aspect Ratio Trench Employing Axially Confined Helicon Wave Plasma

1994 ◽  
Author(s):  
G. Sadakuni ◽  
Y. Kobayashi ◽  
H. Shindo ◽  
T. Fukazawa ◽  
H. Sakaue ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Low Energy ◽  
Helicon Wave ◽  
Helicon Wave Plasma

High growth-rate fabrication of micro-crystalline silicon by Helicon wave plasma CVD

2001 ◽  
Vol 66 (1-4) ◽  
pp. 283-288 ◽  
Author(s):  
Koji Endo ◽  
Masao Isomura ◽  
Mikio Taguchi ◽  
Hisaki Tarui ◽  
Seiichi Kiyama
Keyword(s):  
Growth Rate ◽  
Crystalline Silicon ◽  
High Growth ◽  
High Growth Rate ◽  
Plasma Cvd ◽  
Helicon Wave ◽  
Helicon Wave Plasma

Al Etching Characteristics Employing Helicon Wave Plasma

1993 ◽  
Vol 32 (Part 1, No. 6B) ◽  
pp. 3019-3022 ◽  
Author(s):  
Nobuhiro Jiwari ◽  
Hiroaki Iwasawa ◽  
Akira Narai ◽  
Hiroyuki Sakaue ◽  
Haruo Shindo ◽  
...  
Keyword(s):  
Helicon Wave ◽  
Helicon Wave Plasma
Sign in / Sign up

Export Citation Format

Share Document